Micro-mechanical space optical modulator

Abstract

The invention discloses a micro-mechanical space optical modulator, belonging to the fields of micro-opto-electric-mechanic system technology and communication technology. The optical modulator comprises an optical grating with adjustable period and a micro-torsion mirror, wherein the optical grating with the adjustable period sequentially comprises an optical grating device layer 6 and an optical grating insulating layer 5 from top to bottom; the micro-torsion mirror sequentially comprises a micro-torsion mirror device layer 3, a micro-torsion mirror insulating layer 2 and a micro-torsion mirror base layer 1; and the optical grating with the adjustable period is combined with the micro-torsion mirror into a whole by bonding through the optical grating insulating layer 5 and the micro-torsion mirror device layer 3. The micro-mechanical space optical modulator has the beneficial effects that the micro-torsion mirror is integrated with the optical grating with the adjustable period, so that the functions of an optical switch and an optical attenuator are realized at the same time; the selection of a plurality of optical channels can be realized by the torsion of the micro-torsion mirror, so that the number of light path switching elements can be reduced, and the stability and the response speed of the light path can be improved; and the micro-mechanical space optical modulator can accurately control the optical attenuation when realizing the optical attenuation function.

Description

[0001] Field: [0002] The invention relates to a micromechanical spatial light modulator, which is used for an optical switch and a variable optical attenuator, and belongs to the technical fields of micro-optical electromechanical systems and optical communication. Background technique: [0003] At present, optical fiber communication technology has developed from single-wavelength point-to-point optical time division multiplexing (OTMD) to multi-wavelength mesh dense wavelength division multiplexing (DMDW). The core technology of a generation of high-reliability, ultra-large-capacity, and ultra-high-speed information networks. Optical switches and variable optical attenuators are two key devices for building an all-optical network: optical switches are mainly used to switch optical paths; variable optical attenuators (VOA) transmit optical power through pairs Attenuation to achieve timely control of optical signals, mainly used for channel optical power balance in DWDM sys...

AI Technical Summary

Problems solved by technology

[0005] Most of the existing shading optical switches/optical attenuation spatial light modulators are implemented by using multiple devices and multiple channels, so the number of channels is limited to a certain extent. If a single device is used to implement, the number of channels is less; at the same time, Multi-device and multi-channel will increas

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