End face runout and deflection measuring device and method

Abstract

The invention discloses a double-inductance minimeter-based end face runout and deflection measuring device and a double-inductance minimeter-based end face runout and deflection measuring method to realize online end face runout and deflection measurement of a rotary motion platform. The device comprises two inductance minimeters, a mounting plate, an X direction motion guide rail, a Y directionmotion guide rail, a Z direction guide rail, a motion control card, a data acquisition card and a computer, wherein the motion guide rails drive the two inductance minimeters to move to a measurementposition to acquire position information of a detected position on a measured end face of the rotary motion platform; the acquired position information is transmitted to the computer through the dataacquisition card; the computer combines the acquired position information with the guide rail information of an existing measurement direction to acquire an actual position information of the tested position on the rotary motion platform; the rotary motion platform at an initial position and at a working position is measured twice respectively; the acquired position information of the tested positions are compared and calculated so as to obtain the end face runout and deflection of the rotary motion platform at the working position.

Description

technical field [0001] The invention belongs to the technical field of precision assembly, and relates to a measuring device and method for end surface runout and deflection, which are used for online measurement of the turning precision of a turning motion platform. Background technique [0002] In the assembly of precision micro devices, when precision indexing assembly of rotary components is required, it is inevitable to use a rotary motion platform, and the beating and deflection of the rotary motion platform have an important impact on the assembly posture of the assembled components. Usually, the rotary motion platform will have radial and axial runout indicators when it leaves the factory. In addition, because the installation axis of the rotary motion platform does not coincide with the ideal installation axis, it will cause assembly deflection errors. Runout and runout have a significant impact on the accuracy of precision assemblies and need to be measured by simp...

AI Technical Summary

Problems solved by technology

The above two methods use dial gauge readings, which are difficult to integrate with computer-controlled assembly systems

In addition, such devices are usually special equipment, which are not designed integrally with the assembly unit of the assembly system, and will also introduce measurement errors and affect assembly accuracy

[0005] To sum up, the existing runout and deflection detection methods are difficult to quickly and accurately detect the end face runout and deflection of rotary motion platform devices online, and input the collected signals into the computer control system for subsequent processing

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