Multilayer wiring, semiconductor device, substrate for display and display
A technology for display devices and semiconductors, which is applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., and can solve problems such as cost reduction and increase in display devices.
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Embodiment approach 1
[0039] figure 1 It is a schematic diagram showing the display device substrate of Embodiment 1, (a) is a plan view, and (b) is a cross-sectional view taken along line X1-Y1 in (a).
[0040] The display device substrate 100 of Embodiment 1 is a display device substrate suitable for a display device such as a liquid crystal display device. Such as figure 1 As shown in (a) and (b), the substrate 100 for a display device has a structure in which a semiconductor layer 102, a gate insulating film 103, The wiring layer 121 , the interlayer insulating film 131 , the wiring layer 122 , the interlayer insulating film 132 , the wiring layer 123 , the interlayer insulating film 133 , and the pixel electrode 105 . The semiconductor layer 102 is the first first conductor layer from the substrate 101 side, and has a channel region 102a and high-concentration impurity regions 102b and 102c. The gate insulating film 103 is a first insulating film from the substrate 101 side. The wiring l...
Embodiment approach 2
[0070] Figure 5 It is a schematic diagram which shows the substrate for display devices of Embodiment 2, (a) is a plan view, (b) is a sectional view along the line X2-Y2 in (a).
[0071] The display device substrate 200 of Embodiment 2 is a display device substrate suitable for a display device such as a liquid crystal display device. Such as Figure 5 As shown in (a) and (b), the substrate 200 for a display device has a structure in which semiconductor layers 202n, 202p, and a gate insulating film are stacked sequentially from the substrate 201 side on one main surface side of the substrate 201. 203 , wiring layer 221 , interlayer insulating film 231 , interlayer insulating film 232 , wiring layer 223 , interlayer insulating film 233 and wiring layer 224 . The semiconductor layers 202n and 202p are the first first conductor layers from the substrate 201 side. The gate insulating film 203 is a first insulating film from the substrate 201 side. The wiring layer 221 is a se...
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