Controllable self-clamping SensorFET composite vertical power device
A technology of power devices and power converters, applied in the electronic field, can solve problems such as device temperature rise and inability to discharge avalanche energy
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[0024] A controllable self-clamping SensorFET compound vertical power device, such as image 3 As shown, it includes a main switching tube of a power converter and a SensorFET device; the main switching tube and the SensorFET device of the power converter are integrated on the same P-type substrate 11 .
[0025] The SensorFET device is a vertical structure, including: P-type substrate 12, N - The drift region 13 is located on the P-type substrate 12 and the N - N between the drift region 13 + Buried layer 11; one located at N - In the drift region 13, one end is connected to the metal anode 3, and the other end extends into the N + Deep N-type contact region 10 of buried layer 11; one located at N - The N connected to the metal cathode electrode 5 in the drift region 13 + Region 6; by the deep N-type contact region 10, N + Buried layer 11, N - The N where the drift region 13 is connected to the metal cathode electrode 5 + Area 6 constitutes charging and current detecti...
specific Embodiment approach 2
[0028] A controllable self-clamping SensorFET compound vertical power device, such as image 3 As shown, it includes a main switching tube of a power converter and a SensorFET device; the main switching tube and the SensorFET device of the power converter are integrated on the same P-type substrate 11 .
[0029] The SensorFET device is a vertical structure, including: P-type substrate 12, N - The drift region 13 is located on the P-type substrate 12 and the N - N between the drift region 13 + Buried layer 11; one located at N - In the drift region 13, one end is connected to the metal anode 3, and the other end extends into the N + Deep N-type contact region 10 of buried layer 11; one located at N - The N connected to the metal cathode electrode 5 in the drift region 13 + Region 6; by the deep N-type contact region 10, N + Buried layer 11, N - The N where the drift region 13 is connected to the metal cathode electrode 5 + Area 6 constitutes charging and current detecti...
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