Supercharge Your Innovation With Domain-Expert AI Agents!

Heater and heating furnace tube

A technology for heaters and heating furnaces, applied in the direction of furnace heating elements, etc., can solve the problems of heating furnace tubes and heaters that are prone to failure, and achieve the effects of not being easily deformed, ensuring the heating effect, and reducing failures

Inactive Publication Date: 2012-08-22
SEMICON MFG INT (SHANGHAI) CORP +1
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The problem solved by the invention is the technical problem that the heating furnace tube and the heater are prone to failure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Heater and heating furnace tube
  • Heater and heating furnace tube
  • Heater and heating furnace tube

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0015] As can be seen from the background technology, in the prior art, the heater of the heating furnace tube usually includes many annular resistance wires 23a, 23b, 23c... and fixing pieces 24, and each fixing piece 24 connects all the resistance wires , so that the resistance wire is fixed, so that the heater 22 formed by the resistance wire and the fixing sheet is cylindrical; the heater 22 is arranged on the periphery of the cavity 21 . However, when the above-mentioned heating furnace tube is used for thermal oxidation process and chemical vapor deposition process, as the heating time increases, the heater often breaks down, which leads to failure of the heating furnace tube.

[0016] After research, the inventor thinks that the failure of the heater is due to the heating process, such as figure 2 As shown, the resistance wire will be deformed when it is heated. As the use time increases, the deformation of the resistance wire will become more and more serious. In orde...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a heater and a heating furnace tube. The heater comprises m numbered annular resistance wires and n numbered fixed sheets, wherein adjacent resistance wires are arranged at certain intervals; n / (m-1) numbered fixed sheets are arranged between every two adjacent resistance wires, two adjacent resistance wires are connected together through the fixed sheets, and the fixed sheets connected with the same resistance wire are respectively connected on the different positions of the resistance wire; and m and n are natural numbers, wherein m is less than n and is more than or equal to 3, and n is an integral multiple of m-1. The heater and the heating furnace tube overcome the problem that the heater and the heating furnace tube break down easily.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a heater and a heating furnace tube. Background technique [0002] The semiconductor manufacturing process includes multiple photolithography processes, etching processes, and film forming processes, so that semiconductor elements with special structures are stacked on the surface of the semiconductor wafer. Among them, thermal oxidation and chemical vapor deposition (CVD) processes are commonly used in the film forming process to form various thin films. Among them, the thermal oxidation method is mainly the furnace tube thermal oxidation method. After the reaction gas is passed into the high-temperature furnace tube, the reaction gas reacts with the semiconductor wafer in the furnace to deposit a thin film on the surface of the wafer. This process is used to grow SiO 2 、Si 3 N 4 , SiOH or polysilicon, etc. The furnace tube (furnace) equipment used in th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H05B3/64
Inventor 任瑞龙李军刘刚凌尧
Owner SEMICON MFG INT (SHANGHAI) CORP
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com