Interlaced type photon sieve

Abstract

The invention discloses an interlaced type photon sieve, which comprises a transparent medium, a metallic layer and a superfine structure, wherein the metallic layer is prepared on the transparent medium; the required superfine structure is formed on the metallic layer by etching; the superfine structure comprises a plurality of small holes with different radiuses which are annularly distributed on a plurality of odd annular bands and a plurality of even annular bands; the ratios of the diameters of the small holes on the even and odd annular bands to the width of the located annular band aredifferent; amplitude signs of diffraction optical waves of the small holes on the even and odd annular bands at a focal point are reverse; the small holes on the even and odd annular bands have constructive interference at the focal point; smaller light spots are acquired; and the photon sieve size is increased under the same condition of minimum processing size. Through the interlaced type photon sieve provided by the invention, the size of the main spot formed by the focusing diffraction of the photon sieve can be efficiently compressed and the resolution ratio of an optical system can be increased.

Description

technical field [0001] The invention relates to the field of diffractive optical elements, in particular to an interwoven photon sieve. Background technique [0002] In 2001, Professor Kipp from Germany first proposed the concept of photon sieves in the journal Nature. As a new type of diffraction element, photon sieves can focus and image in the soft X-ray and extreme ultraviolet spectral regions where traditional refraction and reflection optical elements are powerless, thus aroused widespread concern. The photon sieve is based on the zone plate, and replaces the bright ring on the zone plate with a large number of small holes. Compared with traditional zone plates, photon sieves can more effectively suppress sidelobe effects and high-order diffraction, and can obtain larger apertures under the same minimum processing size, thereby improving system resolution. In order to further improve the resolution of the photon sieve, many different methods have been proposed, and t...

AI Technical Summary

Problems solved by technology

In order to further improve the resolution of the photon sieve, many different methods have been proposed, and the phase photon sieve is one of them. However, the production of the traditional phase photon sieve is very complicated when realizing the phase difference distribution of π, which increases the difficulty of processing. It is still a problem to be solved to realize the photon sieve π phase difference distribution easily and improve the resolution of the optical system

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