Substrate processing system
A technology of processing system and substrate, which is applied in the direction of stone processing equipment, stone processing tools, manufacturing tools, etc., to achieve the effect of reliable removal
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[0090] A substrate processing system according to one embodiment of the present invention will be described with reference to the drawings. This substrate processing system is used in the manufacturing process of liquid crystal display panels to divide the mother board conveyed from the previous process into unit display panels, and take out the divided unit display panels one by one and transport them to the subsequent process.
[0091] (substrate processing system)
[0092] First, the overall configuration of the substrate processing system will be described.
[0093] figure 1 It is a perspective view showing the overall structure of the substrate processing system 1 according to one embodiment of the present invention. figure 2 yes figure 1 Shown to the perspective view of A (except for the stand 10 described later). image 3 It is a top view of the substrate processing system 1 (excluding the frame 11 and the support 14 described later). Figure 4 yes image 3 The...
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