Electrode and manufacturing method thereof
An electrode and microsphere technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as low efficiency, reduced junction performance, and low fill factor
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no. 1 example
[0060] The electrode according to the first embodiment of the present invention may include a substantially planar metal thin film layer having a patterned structure configured to transmit incident light through the metal thin film layer.
[0061] Figure 2A Shows a structure view of the electrode sample 200-1 according to the first embodiment made by microsphere photolithography technology, wherein the radius of the polystyrene sphere R=220nm before photolithography, the microsphere radius reduction process is performed The radius of the final polystyrene ball is r=170nm, and the metal film deposited on the quartz substrate is 3nm of Cr plus 25nm of Au. Figure 2B Shows a structure view of the electrode sample 200-2 according to the first embodiment made by the microsphere photolithography technique, wherein the polystyrene sphere has a radius R=220nm before photolithography, and the microsphere radius reduction process is performed The radius of the final polystyrene ball i...
no. 2 example
[0085] Refer below Figure 10 to Figure 14 The electrode and its manufacturing method according to the second embodiment of the present invention will be described in detail.
[0086] Figure 10 A schematic structural diagram of a unimodal electrode 1000 according to a second embodiment of the present invention is shown.
[0087] Such as Figure 10 As shown, the unimodal electrode 1000 according to the second embodiment of the present invention is stacked on a light-absorbing material layer 1010 , and the light-absorbing material layer 1010 is stacked on an underlying metal film (eg, a metal back electrode) 1020 . here, Figure 10 The structure shown in can be equivalent to a solar cell. The unimodal electrode 1000 includes a planar metal thin film layer pattern, and the planar metal thin film layer pattern includes a first microstrip array having a first size and a first shape. In this case, the planar metal thin film layer pattern is configured to transmit incident ligh...
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Abstract
Description
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