Chemical liquid storage equipment and chemical liquid storage and distribution control method
A technology for storage equipment and control methods, applied in gas/liquid distribution and storage, mechanical equipment, containers, etc., can solve problems such as complex devices and complex controls, and achieve the effect of easy operation and simple structure
Inactive Publication Date: 2011-06-15
BEIJING SEVENSTAR ELECTRONICS CO LTD
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But the device is more complicated, and the corresponding control is also more complicated
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[0028] The chemical liquid storage device and the chemical liquid storage and distribution control method proposed by the present invention are described below with reference to the drawings and embodiments.
[0029] Such as figure 1 As shown, a chemical liquid storage device according to an embodiment of the present invention includes several chemical liquid storage devices, a chemical liquid protection device, and a controller, wherein the chemical liquid protection device includes:
[0030] The gas delivery pipeline is connected with several chemical liquid storages, and is used to transport gas to several chemical liquid storages, and discharge excess gas from the exhaust device;
[0031] The chemical liquid delivery pipeline is connected with several chemical liquid storages, and is used to transport chemical liquid to several chemical liquid storages;
[0032] The chemical liquid distribution pipeline is connected with several chemical liquid storages, and is used for d...
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The invention discloses chemical liquid storage equipment and a chemical liquid storage and distribution control method. The chemical liquid storage equipment comprises a plurality of chemical liquid storages, a chemical liquid protection device and a controller, wherein the chemical liquid protection device comprises gas delivery pipelines, chemical liquid conveying pipeline, chemical liquid distributing pipelines, which are all connected with the chemical liquid storages; a plurality of liquid level sensors are arranged on the side wall of each chemical liquid storage in different height; and the controller is connected with all the pipelines and all the liquid level sensors and used for controlling the on-off of each pipeline and detecting the level of the chemical liquid. The equipment and method provided by the invention can carry out dynamic protection on liquid in a plurality of chemical liquid storages, can keep the dynamic balance of gas above the chemical liquid in each storage along with the ascending and descending of the liquid level in a chemical liquid using process, and is simple in structure and easy to operate.
Description
technical field [0001] The invention relates to the technical field of semiconductor cleaning, in particular to a chemical liquid storage device and a chemical liquid storage and distribution control method based on the device. Background technique [0002] In the semiconductor industry, silicon wafers need to be cleaned in various ways, and various chemical liquids are used in the cleaning process. Under normal circumstances, chemical liquids need to be placed in chemical containers, such as tanks or tanks. The process of storage and use is as follows: first, a certain volume of chemical liquid is filled in the container, and the chemical liquid in the container is filled during use. The level will continue to drop, and when it drops to a certain level, the chemical fluid needs to be replenished, and so on. At present, in the prior art, no protective measures are usually taken for the chemical liquid, which will cause large pressure fluctuations of the chemical liquid duri...
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IPC IPC(8): B65D88/02B65D90/32F17D1/02F17D1/08
Inventor 何金群裴立坤昝威王锐廷
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD