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Motor control device and method, impedance matcher and plasma processing equipment

A technology of motor control and resistance, which is applied in the field of microelectronics, can solve the problems of shortening the service life of impedance matching devices, high heat generation of motors, shortening service life of motors, etc., and achieves the effects of reducing heat generation, prolonging motor life, and prolonging service life

Active Publication Date: 2013-11-13
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

Therefore, it is very easy to cause excessive heat generation inside the motor, and prolonged heating will shorten the service life of the motor, thereby shortening the service life of the impedance matching device

Method used

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  • Motor control device and method, impedance matcher and plasma processing equipment
  • Motor control device and method, impedance matcher and plasma processing equipment
  • Motor control device and method, impedance matcher and plasma processing equipment

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Embodiment Construction

[0032] In order to enable those skilled in the art to better understand the technical solution of the present invention, the motor control device, method, impedance matching device and plasma processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0033] The motor control device provided by the present invention is used to adjust the current flowing through the motor according to the rotation speed of the motor, which includes a detection unit, a control unit and a current adjustment unit.

[0034] Wherein, the detection unit is used to detect the rotation speed of the motor, and send the measured rotation speed value of the motor to the control unit. Here, the detection unit can be realized by, for example, a rotational speed sensor, a rotational speed meter and other devices well known to those skilled in the art.

[0035] The control unit obtains the expected current value corresponding to the c...

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Abstract

The invention provides a motor control device, which comprises a detection unit, a control unit and a current adjusting unit and can adjust a current flowing through the motor according to the rotating speed of the motor so as to decrease the heat productivity of the motor and prolong the service life. In addition, the invention also provides a motor control method. The method comprises the following steps of: (10) detecting the rotating speed of the motor; (20) obtaining the corresponding motor current according to the rotating speed of the motor; and (30) adjusting the current of the motor. Moreover, the invention also provides an impedance matcher applying the motor control device and plasma processing equipment applying the impedance matcher. Furthermore, the motor control method, the impedance matcher and the plasma processing equipment can be used for adjusting the current flowing through the motor according to the rotating speed of the motor so as to prolong the service life of the equipment.

Description

technical field [0001] The invention belongs to the technical field of microelectronics, and in particular relates to a motor control device and method, an impedance matching device using the above motor control device, and a plasma processing device using the above impedance matching device. Background technique [0002] With the continuous advancement of science and technology, microelectronic products are widely used, and at the same time, the plasma processing technology used in the production of microelectronic products is also becoming more and more perfect. Plasma processing technology refers to that after the process gas is excited into a plasma state by a high-power radio frequency (Radio Frequency, hereinafter referred to as RF), the charged particles in the plasma are used to produce various physical and chemical reactions with the processed object (such as a wafer, etc.). A processing method that changes the performance and shape of the surface of an object due t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02P8/12H05H1/46
Inventor 王一帆武晔
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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