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Spray device

The technology of spraying device and nozzle is applied in the directions of spraying device, spraying device, liquid spraying device, etc., which can solve the problems of cumbersome movement, difficult to control, complex structure, etc., and achieve the effects of convenient control, uniform spraying and simple structure

Inactive Publication Date: 2011-06-29
DONGGUAN ANWELL DIGITAL MASCH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing spraying devices all have technical defects such as complex structure, difficult control and cumbersome movement.

Method used

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Embodiment Construction

[0013] Such as figure 1 As shown, the spraying device 100 of the present invention includes a frame (not shown in the figure), a linear drive (not shown in the figure), a spraying support 1, a horizontal conveying device 2 and several spray pipes 3, and the horizontal conveying device 2 includes A rotary motor (not shown) and some roller shafts 21, the roller shafts 21 are sleeved with rollers 22, the roller shafts 21 are uniformly installed on the frame and are located on the same plane, and the rotary motors drive The roller shaft 21 rotates, the substrate 200 is carried on the roller 22 , and the horizontal conveying device 2 drives the substrate 200 to be transported in the horizontal direction. The spray bracket 1 is movably connected to the frame and located above the base plate 200, and includes a nozzle bearing frame 11, a support shaft 12 and a transmission shaft 13, and the nozzle 3 is fixed on the nozzle bearing On the frame 11, the transmission shaft 13 is arrange...

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Abstract

The invention discloses a spray device, which is suitable for spraying treating solution to a substrate in a display. The spray device comprises a stander, a linear driver, a spray bracket, a horizontal conveying device and a plurality of spray pipes, wherein the substrate is carried on the horizontal conveying device; the horizontal conveying device is used for driving the substrate to be conveyed in the horizontal direction; the spray bracket is movably connected to the stander and is positioned above the substrate; the linear driver is used for driving the spray bracket to do straight reciprocating motion in the horizontal direction; the movement direction of the spray bracket is perpendicular to the conveying direction of the substrate; the spray pipes are arranged on the spray bracket in parallel and are provided with treating solution inlets which are communicated with the treating solution; and a plurality of pinhole-shaped spray nozzles are formed on one side, which faces the substrate, of each of the spray pipes. The spray device is suitable for cleaning a semiconductor substrate, has a simple structure, is convenient to manipulate and is uniform in spraying.

Description

technical field [0001] The invention relates to a spraying device, in particular to a spraying device for cleaning a substrate in a display with a spraying treatment liquid. Background technique [0002] Production of semiconductor memory devices or flat panel displays such as liquid crystal displays, plasma displays, and organic light-emitting diode displays usually requires various repetitive unit processes on substrates such as semiconductor substrates and glass substrates. For example, various unit processes such as thin film processing, patterning of thin films, and cleaning processes are performed on semiconductor substrates or glass substrates to form circuit patterns with various electrical and optical characteristics on the substrates, and these unit processes are usually It is carried out with some special handling methods using various processing equipment in a clean room. Specifically, the method of performing etching, cleaning and drying on the semiconductor su...

Claims

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Application Information

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IPC IPC(8): B05B9/04B05B15/06B05B1/02H01L21/00B08B3/02
Inventor 杨明生范继良刘惠森余超平王曼媛王勇
Owner DONGGUAN ANWELL DIGITAL MASCH CO LTD
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