Manufacturing method for glass substrate with thin film
A technology of glass substrate and manufacturing method, which is applied in glass manufacturing equipment, glass molding, glass remolding, etc., can solve problems such as warpage of glass substrate
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no. 1 Embodiment approach
[0035] figure 1 It is a cross-sectional view of a glass substrate 1 with a thin film to be manufactured in this embodiment. First, refer to figure 1 The structure of the glass substrate 1 with a thin film is demonstrated.
[0036] like figure 1 As shown, the glass substrate 1 with a thin film includes a glass substrate 10 . The glass substrate 10 can be appropriately selected according to the characteristics of the glass substrate 1 with a thin film, and the like. The glass substrate 10 can be constituted by, for example, a borosilicate glass substrate or the like.
[0037] The glass substrate 10 has 1st and 2nd main surfaces 10a, 10b parallel to each other. The first and second main surfaces 10a, 10b are flat, respectively. A thin film 11 is formed on the first main surface 10a. The thin film 11 can be appropriately selected according to the characteristics of the glass substrate 1 with the thin film, and the like. For example, when the glass substrate 1 with the thin...
no. 2 Embodiment approach
[0063] In the above-mentioned first embodiment, an example in which only one layer of thin film 11 is formed has been described, but the method of manufacturing a glass substrate with thin film of the present invention is also applicable to forming a multi-layer layer on the main surfaces 10a, 10b of the glass substrate 10. In the case of a thin film laminate made of thin films. In this case, compared with the case where only one thin film 11 is formed, the film stress applied to the glass substrate in the cooling step tends to increase. Therefore, there exists a tendency for large warpage to arise in the glass substrate with a thin film. Therefore, it is effective to apply the method of manufacturing a glass substrate with a thin film of the present invention.
[0064] Specific examples of thin film laminates include ZrO 2 film, TiO 2 Membrane and Nb 2 o 3 films such as high refractive index films and SiO 2 A multilayer film obtained by alternately laminating low-refrac...
no. 3 Embodiment approach
[0066] In the above-mentioned embodiments, an example in which the thin film 11 is formed only on one main surface 10 a of the glass substrate 10 has been described. However, the present invention is not limited to this configuration.
[0067] Figure 7 It is a sectional view of the glass substrate 1 with a thin film of this embodiment. as in Figure 7 As shown in , the thin films 11a, 11b can be formed on both of the first and second main surfaces 10a, 10b of the glass substrate 10 . Also in this case, the manufacturing method of the glass substrate with a thin film of this invention can be applied favorably.
[0068] In this embodiment, among the films 11a and 11b, a film with a large compressive stress in the plane direction of the film 11a and 11b is formed on the convex main surface, and a film with a large tensile stress is formed from the film formation to the final state. Formed on the concave main surface.
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Abstract
Description
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Application Information
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