Automatic mechanical hand film feeding/fetching device

A manipulator and automatic technology, applied in manipulators, program-controlled manipulators, photolithographic process exposure devices, etc., can solve the problems of difficult and high-precision positioning, low positioning accuracy of manipulators, collision of spring clips, etc., to avoid pollution, ensure Lithography quality, effect of overcoming wear

Inactive Publication Date: 2011-08-31
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The previous feeding and taking mechanism uses double floating slides and springs to realize the positioning of each state of the manipulator, which is difficult to achieve high-precision positioning; due to long-term use, due to the wear of the mechanica...

Method used

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  • Automatic mechanical hand film feeding/fetching device
  • Automatic mechanical hand film feeding/fetching device
  • Automatic mechanical hand film feeding/fetching device

Examples

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Embodiment Construction

[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0023] Such as figure 1 As shown, the embodiment of the present invention consists of a first grapple 1, a second grapple 2, a first hinge 3, a second hinge 4, a third hinge 5, a fourth hinge 6, a fifth hinge 7, a sixth hinge 8, The first connecting rod 9, the second connecting rod 10, the first gripper 11, the second gripper 12, the positioning shaft 13, the photoelectric switch 14, the main shaft 15, the shaft sleeve 16, the sheet clamp 17, the sheet clamp foot 18, the block 19 and computer composition.

[0024] The first handle 11 and the second handle 12 are connected to the shaft sleeve 16 through the fifth hinge 7 and the sixth hinge 8 . One end of the first connecting rod 9 and the second connecting rod 10 are co...

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PUM

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Abstract

The invention discloses an automatic mechanical hand film feeding/fetching device, which comprises two grappling hooks, six hinges, two connecting rods, two hand grips, a positioning shaft, a photoelectric switch, a spindle, a shaft sleeve, a film clip, a film clip pin, a stopper and a computer, wherein the two hand grips are connected with the shaft sleeve through a fifth hinge and a sixth hinge; one end of one connecting rod and one end of the other connecting rod are connected with the spindle through a third hinge and a fourth hinge respectively; end faces of the two grappling hooks are connected with an end face of the film clip pin; the other ends of the two connecting rods are connected with the middle parts of the two grappling hooks through a first hinge and a second hinge respectively; the positioning shaft is arranged on the shaft sleeve and operates together with the shaft sleeve; the photoelectric switch is fixed on the shaft sleeve; the photoelectric switch positions the film feeding and fetching position of the shaft sleeve through a positioning stopper on the positioning shaft; and the computer detects the position of the shaft sleeve through a feedback signal of the photoelectric switch and controls motion of the spindle according to the position state of the shaft sleeve. Therefore, the two grappling hooks are opened and closed at specified positions, and fed and fetched films are provided for exposure work.

Description

technical field [0001] The invention relates to an automatic manipulator feeding and taking device, which is used in electron beam exposure machines, and can also be used in fields such as workpiece feeding and picking in industrial automation. Background technique [0002] The previous feeding and taking mechanism used double floating slides and springs to realize the positioning of each state of the manipulator, and it was difficult to achieve high-precision positioning; due to long-term use, due to wear of the mechanical part and stress fatigue of the spring, it is easy to cause the manipulator to clamp the film. Phenomena such as collisions or missing pieces. In view of the above-mentioned problems of low positioning accuracy and low reliability of the manipulator. Contents of the invention [0003] The technical problem of the present invention is: the manipulator can timely and accurately open and close the gripper when feeding the film before exposure and taking th...

Claims

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Application Information

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IPC IPC(8): B25J9/08B25J19/00B25J15/08G03F7/20
Inventor 邢薇王肇志
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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