Equipment for processing silicon tetrachloride as byproduct of polysilicon
A technology of silicon tetrachloride and processing equipment, applied in the direction of silicon oxide, silicon dioxide, chlorine/hydrogen chloride, etc., to achieve the effect of improving circular economy, low cost, simple structure and operation
Active Publication Date: 2012-09-19
CHINA ENFI ENGINEERING CORPORATION +1
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Problems solved by technology
At present, the polysilicon preparation methods used in the world are the improved Siemens method, that is, the hydrogenation reduction of trichlorosilane is used, and the by-product is mainly silicon tetrachloride. The by-product silicon tetrachloride produced by producing 1 ton of polysilicon is about 12 ~18 tons, so how to deal with the by-product silicon tetrachloride has become a major bottleneck in the development of the polysilicon industry
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[0035] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present invention, but should not be understood as limiting the present invention.
[0036] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying The description does not indicate or imply tha...
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Abstract
The invention discloses equipment for processing silicon tetrachloride as a byproduct of polysilicon. The equipment comprises a reactor, a collecting cooler, a gathering device a separator and a deacidifying device, wherein the collecting cooler is arranged below the reactor so as to facilitate the connection between a feed port of the cooler and an outlet of the reactor; an inlet of the gathering device is connected with a discharge port of the cooler; the separator is provided with a separator inlet, a gas outlet and a solid outlet, and the separator inlet is connected with the outlet of the gathering device; and the upper part of the deacidifying device is provided with a tail gas outlet and a discharge port of the deacidifying device, the lower part of the deacidifying device is provided with a steam inlet and a feed port of the deacidifying device, and the feed port of the deacidifying device is connected with the solid outlet of the separator. According to the equipment for processing the silicon tetrachloride as the byproduct of the polysilicon in the invention, the silicon tetrachloride as the byproduct of the polysilicon can be used for producing micrometer-grade silicon diode, so that the problem that the silicon tetrachloride as the byproduct restricts the production of the polysilicon is solved, the produced micrometer-grade silicon dioxide has extensive applications, and a circular economy effect is enhanced; and in addition, the equipment has the advantages of simple structure, simplicity for operation and low cost.
Description
Technical field [0001] The invention relates to a processing equipment for polycrystalline silicon by-product silicon tetrachloride, in particular to a processing equipment for producing silicon dioxide from the polycrystalline silicon by-product silicon tetrachloride. Background technique [0002] In recent years, with the development of silicon solar cells, the polysilicon market has grown rapidly. At present, the polysilicon preparation methods used in the world are all modified Siemens methods, that is, using trichlorosilane hydrogenation reduction. The by-product is mainly silicon tetrachloride. The by-product silicon tetrachloride produced by producing 1 ton of polysilicon is about 12 ~18 tons, so how to deal with the by-product silicon tetrachloride has become a major bottleneck in the development of the polysilicon industry. Summary of the invention [0003] An object of the present invention is to provide a polysilicon by-product silicon tetrachloride treatment equipment...
Claims
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IPC IPC(8): C01B33/12C01B7/01
Inventor 严大洲毋克力肖荣晖汤传斌谢正和杜俊平谢冬晖汪绍芬郭富东
Owner CHINA ENFI ENGINEERING CORPORATION