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Acceleration sensor and acceleration detecting apparatus

A technology of acceleration sensor and detection device, applied in measurement device, speed/acceleration/impact measurement, measurement acceleration and other directions, can solve the problems of high cost of accelerometer, multiple working hours, deterioration of Q value, etc., to improve yield and detection accuracy , Improve the detection sensitivity, improve the effect of detection accuracy

Inactive Publication Date: 2011-08-31
SEIKO EPSON CORP
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AI Technical Summary

Problems solved by technology

[0011] However, the accelerometer disclosed in Patent Document 1 is constituted by using one central element 127, two converter elements 128, and two covers, and there is a problem that the number of parts is too large.
Furthermore, since the central element 127 and the converter element 128 have extremely complicated structures, assuming that the yield of these elements is low, the adjustment of the acceleration after assembly may require many man-hours, and there is a problem that the cost of the accelerometer is extremely high.
[0012] In addition, since the gas for braking is sealed inside the accelerometer, the Q value of the vibrating element 151 of the converter element 128 deteriorates, and there is a problem that it is difficult to excite.

Method used

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  • Acceleration sensor and acceleration detecting apparatus
  • Acceleration sensor and acceleration detecting apparatus
  • Acceleration sensor and acceleration detecting apparatus

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Embodiment Construction

[0044] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. figure 1 It is a schematic diagram showing the structure of the acceleration sensor 1 which concerns on one Embodiment of this invention, (a) is a plan view, (b) is Q-Q cross-sectional view. The acceleration sensor 1 includes a piezoelectric sensor 10 and a support substrate 4 having a first support surface 5 a and a second support surface 7 a that support the piezoelectric sensor 10 .

[0045] Piezoelectric sensor 10 has: Piezoelectric sensor element 20, and its generation and figure 1 The electric signal corresponding to the force of the detection shaft direction 9 shown in (b); the first fixed part 14a and the second fixed part 14c, they are respectively fixed on the first supporting surface 5a and the second supporting surface 7a, so that The piezoelectric sensor element 20 is supported on the support substrate 4; connect.

[0046] like figure 1 As sh...

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Abstract

The invention provides an acceleration sensor and an acceleration detecting apparatus, which has a simple structure and high acceleration detecting performance and can reduce the manufacturing cost thereof. The acceleration sensor includes a piezoelectric sensor and a support plate. The piezoelectric senso comprises: a piezoelectric sensor element; a first fixed portion (14a) and a second fixed portion (14c) to support the piezoelectric sensor element on the support plate; and first to fourth beams (12a-12d) connecting the piezoelectric sensor element to the first fixed portion and the second fixed portion. The support plate includes a fixation-side first plate piece (5) for fixing the first fixed portion, a movement-side second plate piece for supporting the second fixed portion, and a hinge portion, wherein the piezoelectric sensor element has a longitudinal shape extending in a direction perpendicular to the sensing axis direction and the center of the sensor element in the lateral direction is located within the width of the hinge portion in the lateral direction.

Description

technical field [0001] The present invention relates to an acceleration sensor and an acceleration detection device, and more particularly to an acceleration sensor and an acceleration detection device which are improved by changing the direction of force generated when acceleration is applied and increasing the force. Background technique [0002] An acceleration sensor using a piezoelectric vibrating element is configured such that when a force in the detection axis direction acts on the piezoelectric vibrating element, the resonance frequency of the piezoelectric vibrating element changes, and acceleration applied to the acceleration sensor is detected based on the change in the resonance frequency. [0003] Patent Document 1 discloses an accelerometer and a manufacturing method having a structure in which a double-tuning-fork type vibrating element is joined to one diagonal corner of a frame-like parallelogram frame, and a compressive or tensile force is applied to the ot...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/09G01P15/10H01L41/08H01L41/18H01L41/22H01L41/313
CPCG01P15/097G01P15/09G01P15/08
Inventor 渡边润中仙道和之
Owner SEIKO EPSON CORP
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