A multi-channel independent control integrated microfluidic chip based on thin-film acoustic wave device
A technology of microfluidic chip and thin-film acoustic wave, which is applied in the direction of analyzing fluid, laboratory utensils, chemical instruments and methods by using sound wave/ultrasonic wave/infrasonic wave, etc. Complicated, costly to resolve effects
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[0036] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0037] see figure 1 As shown, a multi-channel independent control integrated microfluidic chip based on a thin film acoustic wave device includes an upper cover sheet 1 and a lower substrate 8, and the cover sheet 1 is integrated with a sample chamber 2, a liquid storage tank 7, a thin film acoustic wave The fixed groove of the sensor 5, the microvalve switch structure and the microcolumn positioning structure 6, the microchannel is formed on the substrate 8, and the microvalve switch structure is composed of a valve membrane 4 and a valve cavity 1-1, and the valve membrane 4 is pressed by the microvalve switch fixing device 3, and the microvalve switch fixing device 3 is accurately positioned by the microcolumn positioning structure 6.
[0038] Further, the thin film acoustic wave sensor 5 is placed in the groove, and the thin film...
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