Multi-shaft synchronous operation control system

Abstract

The invention relates to a multi-shaft synchronous operation control system, belonging to the technical field of geometrical product measurement. The system comprises a photoelectric encoder signal processing circuit, a limit and zero signal receiving circuit, a digital signal processor, a universal serial bus (USB) communication interface circuit, a control output relay and a control output circuit, and peripheral equipment is a multi-shaft supported one-dimensional variable posture precise motion platform. The multi-shaft synchronous motion control system has the advantages that the high-precision and large-range operation of a workbench is realized through cooperation of the one-dimensional variable posture precise motion platform, and the space posture of the workbench can be regulated according to instructions so as to ensure that the motion platform has a translation range of dozens of millimeters, nano-grade motion resolution, a space rolling posture regulation function and second-grade posture regulation precision. The system provided by the invention can be used for controlling the one-dimensional variable posture precise motion platform to be recovered to a predetermined'zero posture', and solving the problem of out of control of output of the control output circuit in an electrifying process.

Description

Technical field [0001] The invention relates to a multi-axis synchronous operation control system, in particular to a precision motion control system that can be applied to a one-dimensional nanometer precision variable attitude precision motion platform, and belongs to the technical field of geometric quantity measurement. Background technique [0002] At present, the measurement range of instruments used in nanometer-level precision measurement is generally very small. This requires precise installation of the measured object and adjustment of the installation posture of the sample within a certain range. [0003] There are currently commonly used one-dimensional precision motion platforms. Although some can achieve large strokes, they can only achieve a positioning accuracy of a few microns, such as a ball guide platform; some can achieve nano-level positioning accuracy, but only tens of A stroke of one micrometer, such as a piezoelectric ceramic micro-displacement motion platf...

AI Technical Summary

Problems solved by technology

[0006] 2. Multiple motion axes can follow one axis, but in this way, the error of the followed axis will also be superimposed on other axes, resulting in a large deviation between the actual motion effect and the expected effect;

[0007] 3. In the open-loop control mode, the motion error is relatively large; in the closed-loop control mode, it cannot stop at one position stably, but repeatedly adjusts, which is not conducive to the stability of the platform, and the switching between the two control modes often causes The shaking of the sports platform;

[0008] 4. Unable to control the variable attitude platform to return to a pre-set "zero attitude"

[0009] 5. Unable to control the output state during the power-on process of the system

During the power-on process of the control system, the output circuit part is in an out-of-control state, which often causes malfunction of the peripheral driver due to unexpected interference, which is not conducive to the stability of the platform.

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