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Chemical vapor deposition furnace

A technology of chemical vapor deposition and furnace body, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of high labor intensity and high labor cost, and achieve easy disassembly, high output and large volume Effect

Active Publication Date: 2011-09-14
XIAN ELECTRIC FURNACE INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the production process, the operators must monitor the working conditions of the system at any time, and solve the hidden dangers immediately. The labor intensity of the workers is quite high, and the labor cost is high.

Method used

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Embodiment Construction

[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0021] see figure 1 , 2 , the present invention includes a furnace body 1, a furnace body lifting mechanism 2, a furnace cover lifting mechanism 3, a three-stage filtration system 4, a vacuum system 5, and a heater 6. The heater 6 includes an upper heating body, a middle heating body, and a lower heating body. The heating body, the furnace body 1 adopts a vertical and internal heating structure, including a furnace cover 13, an upper furnace body 14, a lower furnace body 15, and a furnace bottom 16. The upper furnace body 14 and the lower furnace body 15 are cylindrical and double-layer water-cooled structure, the heating body in the lower area is fixed on the bottom of the furnace, and the electrodes are drawn out from the bottom of the furnace; the heating body in the middle area is fixed in the upper furnace body, and the electrodes are d...

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Abstract

The invention relates to a chemical vapor deposition furnace. Most of the chemical vapor deposition furnaces are transformed on the basis of original vacuum furnaces. In the process of production, an operating worker has to monitor the working condition of a system at any time, and a hidden trouble discovered is required to be solved right away, so the labor intensity of the worker is quite high, and the labor cost is high. The chemical vapor deposition furnace provided by the invention comprises a furnace body, a furnace body lifting mechanism, a furnace cover lifting mechanism, a three-level filtration system, a vacuum system and a heater, wherein the heater comprises an upper section heating unit, a middle section heating unit and a lower section heating unit; and the furnace body has a vertical and internal heat type structure, and comprises a furnace cover, an upper furnace body, a lower furnace body, and a furnace bottom. The chemical vapor deposition furnace adopts an integrated heat shield which is convenient to dismount and clean; and the upper furnace body heating unit is fixed in the furnace body and is convenient to load and unload materials and clean the interior of the furnace.

Description

technical field [0001] The invention belongs to heat treatment equipment, in particular to a chemical vapor deposition furnace. Background technique [0002] The CVD chemical vapor deposition furnace uses the principle of chemical vapor deposition (Chemical Vapor Deposition) to heat the substances involved in the chemical reaction to a certain process temperature, and under the gravitational force generated by the vacuum pump pumping system, it is led to the deposition chamber for reaction and deposition. , forming a new solid substance. In order to obtain the deposition thickness required by the process, the deposition process generally needs to work continuously for about 20 days. In order to better prepare high-quality products, the deposition process is not only required to be carried out in a very clean environment, if there is powder in the deposition chamber, the deposition effect will be affected, and the deposition process is required to be carried out continuously...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44
Inventor 王利花张淑蓉李勇
Owner XIAN ELECTRIC FURNACE INST
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