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Laser processing device, laser source device and controlling method thereof

A laser processing and laser technology, which is applied in lasers, metal processing, laser welding equipment, etc., can solve the problems of not being able to fully utilize fiber lasers

Inactive Publication Date: 2011-09-21
ORMON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0056] However, as described in Patent Document 3, if only a solid-state laser amplifier is provided in the subsequent stage of the fiber laser, the problem that the beam parameters as described above change when the pulse energy and repetition frequency of the laser light are changed cannot be avoided. The advantages of fiber lasers cannot be fully utilized

Method used

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  • Laser processing device, laser source device and controlling method thereof
  • Laser processing device, laser source device and controlling method thereof
  • Laser processing device, laser source device and controlling method thereof

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Embodiment approach

[0097] 2. Modification

[0098]

[0099] [Structure Example of Laser Processing Device]

[0100] image 3 It is a block diagram showing a configuration example of an embodiment of the laser processing apparatus of the present invention. image 3 The laser processing device 101 in FIG. 1 uses optical systems such as a slit 115 and an objective lens 118 to deform the laser light output from the laser light source device 111 into a shape and size suitable for processing, and irradiates the laser light onto the substrate 102 for processing. The laser processing device 101 includes a laser light source device 111 , a beam expander 112 , mirrors 113 , 114 , a slit 115 , a lens 116 , a mirror 117 , an objective lens 118 , and a gas window 119 .

[0101] The laser light source device 111 is a light source device for emitting laser light, which can change the pulse width, pulse energy and repetition frequency of the emitted laser light. For example, the laser light source device 1...

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Abstract

The invention provides a laser processing device, which can change the pulse energy and repeating frequency of the laser while ensuring the excellent processing precision by using the same laser source devices. The laser lights emitted by a seed LD (151) are amplified by an optical fiber amplifier (153) and an optical fiber amplifier (155), and then amplified by a means of a solid laser amplifier (158). A control section (160) controls to synchronously irradiate the laser lights to a solid laser medium with the excitation lights for exciting the solid laser medium of the solid laser amplifier (158), and controls the strength of the excitation lights according to the repeating frequency of the laser lights to change the power of the excitation lights to be a ruled value in a unit time. The device can be used in a laser repairing device, etc.

Description

technical field [0001] The present invention relates to a laser processing device, a laser light source device and a control method for the laser light source device, in particular to a laser processing device, a laser light source device and a laser light source suitable for use in laser processing by changing the repetition frequency of the laser The control method of the device. Background technique [0002] At present, laser processing devices that use lasers to perform microfabrication are widely used, such as for correcting substrate wiring defects of display panels such as LCD (Liquid Crystal Display) panels and organic EL (Electro-Luminescence: Electroluminescence) panels. Laser repair equipment, etc. [0003] Microprocessing using a laser can be broadly classified into two types, that is, drawing processing for forming a line pattern on a material surface and drilling processing. Furthermore, in the laser processing apparatus for microprocessing, the pulse width, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/38B23K26/36H01S3/102B23K101/36B23K26/00H01S3/00H01S3/10H01S3/131
CPCH01S3/06708H01S3/08072H01S3/1026H01S3/1121
Inventor 三浦泰祐
Owner ORMON CORP