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AFM (Atomic Force Microscope)-based device for performing nanoindentation measurement on surface of microparticle

An atomic force microscope and nanoindentation technology, which is used in measurement devices, scanning probe microscopy, instruments, etc., can solve the problem that the sample position is not easy to fix, the particle size is small, and the needle process and indentation position of the nanoindentation needle are affected. choice, etc.

Inactive Publication Date: 2011-09-28
CHINA NAT ACAD NANOTECH & ENG
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Nanoindentation technology has been widely used in the field of measuring the mechanical properties of thin films on the surface of bulk materials. However, due to the small particle size of micron-scale particles, the position of the sample is not easy to fix, which affects the needle insertion process and the The selection of the indentation position creates a research gap in this field

Method used

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  • AFM (Atomic Force Microscope)-based device for performing nanoindentation measurement on surface of microparticle
  • AFM (Atomic Force Microscope)-based device for performing nanoindentation measurement on surface of microparticle
  • AFM (Atomic Force Microscope)-based device for performing nanoindentation measurement on surface of microparticle

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Embodiment 1

[0025] Embodiment 1: a kind of measurement device based on the nano-indentation of the surface of microparticles of atomic force microscope (see figure 1 ), which is composed of an atomic force microscope system, including a scanning controller, a scanning probe microscope main body, a magnifying glass display system, a computer host, a monitor, a keyboard and a mouse, wherein the scanning probe microscope main body includes a base, a scanning tube, a needle tip holder, Electronic circuit connection unit, laser optical path and magnifying glass system, characterized in that there is a sheet plane (3) on which the sample to be tested (2) is placed on the sample stage on the top of the scanning tube, and the sheet plane (3) is bonded and fixed to be tested. The double-sided adhesive tape of the sample (2) is fixed in the tip holder, and the nano-indentation tip (1) for scanning and nano-indentation operations is arranged, and the nano-indentation tip (1) is placed above the sampl...

Embodiment 2

[0040] Embodiment 2: a kind of measurement device based on the nano-indentation of the surface of microparticles of atomic force microscope (see figure 1 ), which is composed of an atomic force microscope system, including a scanning controller, a scanning probe microscope main body, a magnifying glass display system, a computer host, a monitor, a keyboard and a mouse, wherein the scanning probe microscope main body includes a base, a scanning tube, a needle tip holder, Electronic circuit connection unit, laser optical path and magnifying glass system, characterized in that there is a sheet plane (3) on which the sample to be tested (2) is placed on the sample stage on the top of the scanning tube, and the sheet plane (3) is bonded and fixed to be tested. The double-sided adhesive tape of the sample (2) is fixed in the tip holder, and the nano-indentation tip (1) for scanning and nano-indentation operations is arranged, and the nano-indentation tip (1) is placed above the sampl...

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Abstract

The invention provides an AFM (Atomic Force Microscope)-based device and method for performing nanoindentation measurement on the surface of a microparticle. The device is composed of an AFM system, a sheet-shaped plane for holding a sample to be measured is arranged on a sample platform at the top of a scanatron, a double faced adhesive tape for sticking and fixing the sample to be measured is arranged on the sheet-shaped plane, and a nanoindentation needle tip for scanning and nanoindentation operation is fixed in a needle tip holder and arranged above the sample to be measured. When the device is in use, the sample to be measured is adhered to the sheet-shaped plane with the double faced adhesive tape; the sheet-shaped plane is placed on the sample platform at the top of the scanatron; and then the nanoindentation needle tip fixed in the needle tip holder performs scanning and nanoindentation operation above the sample to be measured, wherein the nanoindentation needle tip is a diamond needle tip and has an elasticity coefficient remained between 100N / m and 300N / m and an resonance frequency of 35-65khz. According to the invention, nanoindentation measurement is successfully carried on the surface of a detected powdery microparticle sample with the particle size of 20-80 micrometers.

Description

(1) Technical field: [0001] The invention relates to an atomic force microscope technique and a nano-indentation measurement technique, in particular to a device and a working method for analyzing and measuring a thin film on the surface of micro particles through the two techniques. (two) background technology: [0002] Atomic Force Microscopy (AFM for short) is a surface imaging technology. In general, the lateral resolution of AFM can reach 0.2 nanometers, and the vertical resolution can reach 0.1 nanometers. The working principle of the atomic force microscope is to use the interaction between the atoms at the tip of the needle and the atoms on the surface of the sample to image the pattern. The needle tip is fixed at one end of the elastic micro-cantilever beam, and a beam of laser light is reflected from the back of the elastic micro-cantilever beam to the photodetector. Weak repulsive force, due to the unevenness of the sample surface, the needle tip will fluctuate i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/38G01Q60/24
Inventor 马丽颖高瑞玲俞晓正
Owner CHINA NAT ACAD NANOTECH & ENG
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