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Discrimination method for laser damage on the surface of a film or an optical element and determination device thereof

A technology of optical components and laser damage, which is applied in the direction of material excitation analysis, etc., can solve the problems of judgment failure, and achieve the effects of fast discrimination, wide range of types, and stable and accurate results

Inactive Publication Date: 2011-10-26
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

[0007] The present invention provides a method for judging laser damage on the surface of a thin film or an optical element, so as to overcome the problem of misjudgment and judgment failure in the prior art

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  • Discrimination method for laser damage on the surface of a film or an optical element and determination device thereof
  • Discrimination method for laser damage on the surface of a film or an optical element and determination device thereof
  • Discrimination method for laser damage on the surface of a film or an optical element and determination device thereof

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with accompanying drawing.

[0020] The invention provides a method for discriminating laser damage on the surface of a thin film or an optical element. The laser is used to irradiate the sample with a single pulse of laser light. If the sample surface is not damaged, no plasma flash occurs on the surface; if the sample surface is damaged , A strong plasma flash will occur at the moment of damage, analyze the flash spectrum, and if there are luminescence peaks of elements other than N, O, H, and C, it is determined that damage has occurred.

[0021] The core of this method is that instead of taking light intensity change as the criterion of damage, it adopts the method of plasma spectrum peak position analysis, and uses the difference of absorption peak position of thin film and atmospheric flash spectrum as the criterion of damage or not. Because the atmosphere mainly contains N, O, C, H and other ele...

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Abstract

The invention relates to a discrimination method and determination device for laser damage on the surface of a film or an optical element and a determination device therof. The prior art has the disadvantages of strong subjectivity, great working intensity and low testing efficiency. The invention provides a discrimination method for laser damage on the surface of a film or an optical element. According to the method, an operating laser beam carries out monopulse laser irradiation on a sample; if the surface of the sample has no damage, the surface does not produce plasma flash; if the surface is damaged, strong plasma flash is generated the moment the damage appears, and if a photoluminescence peak of an element not being N, O, H or C appears according to analysis of a flash spectrum, appearance of damage can be determined. The invention also discloses a determination device realizing the above-mentioned method. The device comprises a laser generator and a test board and is characterized by further comprising a convergent lens and a fibre-optical probe on the imaging surface of the convergent lens, wherein the fibre-optical probe, a fiber spectrometer and a computer are connected sequentially. According to the invention, high precision in the discrimination is obtained; the discrimination speed is fast; a wide variety of films can be discriminated; the construction of the determination device is simple.

Description

technical field [0001] The invention relates to a method for judging laser damage on the surface of a thin film or an optical element and a judging device thereof. technical background [0002] In high-power and high-energy laser systems, there are a large number of thin-film components, and the ability of these components to resist laser damage is closely related to the normal and effective operation of the system. Previous studies have shown that the damage of thin film components under strong laser is completely determined by the anti-laser ability of the thin film on the surface of the component. Therefore, with the continuous expansion of the application range of high-power lasers, the importance of the anti-laser damage performance of thin films has become increasingly prominent, so that the laser damage threshold has become an indispensable performance index for optical thin-film components, so the test for laser damage threshold of optical thin films is also importan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/63
Inventor 苏俊宏徐均琪惠迎雪梁海锋杨利红朱昌
Owner XIAN TECHNOLOGICAL UNIV
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