Method for adjusting laser beam to generate dynamic transverse displacement

Abstract

The invention discloses a method for adjusting the dynamic lateral displacement of a laser beam, which includes: 1) placing the cuboid electro-optic prism composed of four cut wedge-shaped electro-optic prisms on the horizontal plane of the outgoing laser beam; 2) setting the z-axis, x' axis and y' axis; 3) respectively apply a voltage in the z-axis direction on four wedge-shaped electro-optic prisms; The optical axis direction is opposite to the z axis; 5) the laser beam is injected along the y' axis direction, and the refractive index difference between the first and second wedge-shaped electro-optic prisms is determined for the incident laser beam of the laser; 6) the laser beam passes through the wedge-shaped prism I The deflection angle of entering the wedge prism II; 8) The outgoing beam of the laser beam is deflected in the y' direction, and a lateral displacement is generated in the x' direction, and the voltage is changed to generate a dynamic lateral displacement. According to the principle of electro-optic deflection, the method adjusts the voltage value input to the wedge-shaped electro-optic prism, and can generate dynamic lateral displacement synchronously, and the precision can be guaranteed.

Description

technical field [0001] The invention relates to a method for adjusting the lateral displacement of a laser beam in the field of laser micromachining, in particular to a method for adjusting a laser beam to generate a dynamic lateral displacement. Background technique [0002] In the field of laser micromachining, it is often necessary to adjust the lateral displacement of the laser beam to scan and cut special-shaped holes. There are two existing methods for changing the lateral displacement of the beam. One is to use a parallel plate and place the parallel plate obliquely at a fixed angle. If the beam is incident vertically, a fixed lateral displacement can be generated; if the parallel plate is tilted and the inclination is changed, a dynamic lateral displacement can be generated. The disadvantage of this method is that the swing of the parallel plate requires mechanical control, which is difficult to achieve. The existence of , the accuracy is not easy to guarantee. Anot...

AI Technical Summary

Problems solved by technology

[0002] In the field of laser micromachining, it is often necessary to adjust the lateral displacement of the laser beam to scan and cut special-shaped holes. There are two existing methods for changing the lateral displacement of the beam. One is to use a parallel plate and place the parallel plate obliquely at a fixed angle. If the beam is incident vertically, a fixed lateral displacement can be generated; if the parallel plate is tilted and the inclination is changed, a dynamic lateral displacement can be generated. The disadvantage of this method is that the swing of the parallel plate requires mechanical control, which is difficult to achieve. The existence of the existence, the accuracy is not easy to guarantee

Another method is to use double optical wedges with a certain interval, that is, cut the parallel plate along the diagonal to make two optical wedges, adjust the air gap between the two optical wedges, and dynamically change the lateral displacement. In the vertical direction, it is necessary to mechanically control the uniform movement to change the size of the interval. There is also the problem of control, which is relatively difficult to achieve, and the mechanical accuracy is not easy to guarantee.

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