A kind of diffusion method for preparing polycrystalline silicon solar cell emitter

Abstract

The invention discloses a diffusion method for preparing a polycrystalline silicon solar cell emitter, which belongs to the technical field of solar cells. The present invention uses a liquid POCl3 phosphorus source to carry out three times of source diffusion with the same conditions: using a liquid POCl3 phosphorus source, the temperature is 760-880°C, the flow rate of large nitrogen gas is 18-28L/min, and the flow rate of oxygen is 0.4-3.4L/min , the small nitrogen gas flow rate is 0.3-2.3L/min, the diffusion time is 1-20min, and the first diffusion is carried out; after the diffusion, a large nitrogen and oxygen mixed gas is introduced to carry out constant temperature pushing. The PN junction formed by this diffusion method has low concentration of impurities on the surface and uniform distribution of impurities, which is beneficial to the collection of electrons, reduces the efficiency loss of solar cells due to recombination, and improves the conversion efficiency by 0.11. conditions without increasing the complexity of the process.

Description

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AI Technical Summary

Benefits of technology

This technology helps improve the performance of solar cell devices that use crystalline silicon wafers for their substrates. By mixing these gases together at high temperatures or pressure, they create an oxidized layer over the entire area where it's used during manufacturing processes. These layers help prevent defects from happening inside the device while also controlling its properties such as conductivity. Overall this method allows for better quality products without increasing processing steps compared to traditional methods like two pass sources diffusion.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the manufacturing processes for producing small area photovoltaic devices without compromising their effectiveness due to variations caused during these methods.

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