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High-temperature solar selective absorption coating with SiO2 and TiO2 bi-ceramic structure and preparation method thereof

A technology for absorbing coatings and solar energy, applied in the field of solar energy utilization, can solve the problems of unstable microstructure and physical properties, low deposition rate, long production cycle, etc., achieve stable microstructure and physical properties, simple preparation process, and easy operation convenient effect

Active Publication Date: 2013-12-18
北京天瑞星光热技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the microstructure and physical properties of cermet structural coatings are unstable at high temperatures due to the large number of metal atoms.
Moreover, the deposition rate of processes such as radio frequency sputtering is low, the production cycle is long, the process is complicated, and the cost is high

Method used

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  • High-temperature solar selective absorption coating with SiO2 and TiO2 bi-ceramic structure and preparation method thereof
  • High-temperature solar selective absorption coating with SiO2 and TiO2 bi-ceramic structure and preparation method thereof

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preparation example Construction

[0025]The invention provides a kind of SiO 2 and TiO 2 The preparation method of the double ceramic structure high temperature solar energy selective absorption coating, such as figure 2 shown, including the following steps:

[0026] Step 1: preparing the first infrared emitting layer on the substrate;

[0027] A pure metal target DC or intermediate frequency magnetron sputtering method is adopted. The pure metal target is a Cu target or an Ag target (both with a purity of 99.99%), prepared with Ar gas as a sputtering gas, and the substrate is made of high-speed steel. Before sputtering, the vacuum chamber was pre-evacuated to a background vacuum of 4×10 -3 ~5×10 -3 Pa, the inert gas Ar gas is introduced as the sputtering atmosphere, the Ar gas flow rate is 100-140sccm, the sputtering distance is adjusted to 130-150mm, and the sputtering pressure is adjusted to 3×10 -1 ~4×10 -1 Pa. Turn on the power supply of the sputtering target of the pure metal target, adjust the s...

Embodiment 1

[0034] This embodiment provides a SiO 2 and TiO 2 The dual-ceramic structure solar selective absorption coating consists of three coatings, which are divided into the first layer of infrared reflection layer, the second layer of absorption layer, and the third layer of anti-reflection layer. The thickness of the first layer is 150nm, and the thickness of the second layer is The total thickness of the two layers is 140nm, of which the thickness of the first sublayer is 80nm, the thickness of the second sublayer is 60nm, and the SiO in the first sublayer 2 The volume percentage is 60%, the rest is TiO 2 ; second sublayer SiO 2 The volume percentage is 40%, the rest is TiO 2 ; The thickness of the third layer is 50nm. Preparation of the above SiO with 2 and TiO 2 The method for the double ceramic structure solar energy selective absorption coating comprises the following steps:

[0035] Step 1: preparing the first infrared emitting layer on the substrate;

[0036] The Cu ...

Embodiment 2

[0044] The present embodiment provides a kind of SiO 2 and TiO 2 The double-ceramic structure high-temperature solar selective absorption coating consists of three layers of films, from the bottom to the surface, which are infrared reflection layer, absorption layer and anti-reflection layer; the first layer of infrared reflection layer is Cu film with a thickness of 50nm ; The second absorber layer consists of two sublayer structures, both of which are SiO 2 +TiO 2 film, the thickness of the first sublayer and the second sublayer are both 50nm, and the SiO in the first sublayer 2 The volume percentage is 50%, the rest is TiO 2 , the second sublayer SiO 2 The volume percentage is 30%, the rest is TiO 2 ; wherein the first sublayer is adjacent to the first infrared reflective layer, and the second sublayer is adjacent to the third antireflective layer; the third antireflective layer is SiO 2 film with a thickness of 40 nm.

[0045] One of the above has SiO 2 and TiO 2 ...

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Abstract

The invention provides a high-temperature solar selective absorption coating with a SiO2 and TiO2 bi-ceramic structure and a preparation method thereof, belonging to the technical field of solar utilization. The coating comprises an infrared reflection layer, an absorption layer and an antireflection layer in sequence from the bottom layer to the surface; the infrared reflection layer a Cu or Ag film with the thickness of 50-250nm; the absorption layer comprises two sublayer structures which are both SiO2+TiO2 films; the antireflection layer is a SiO2 film with the thickness of 40-80nm. The coating provided by the invention has the characteristics of high visible-infrared spectrum absorptivity, low infrared spectrum emissivity and favorable intermediate and high temperature thermostability; in addition, the preparation process of the coating is simple and convenient, convenient to operate, easy to control and reduced in production cycle; and the coating disclosed by the invention has low metal ion content, very stable microstructure and physicality under high temperature, very common target material, wide application range and good formability.

Description

technical field [0001] The invention belongs to the technical field of solar energy utilization, in particular to a 2 and TiO 2 High-temperature solar selective absorption coating with double ceramic structure and preparation method thereof. Background technique [0002] The solar spectrum selective absorption coating has a high absorption rate in the visible-near-infrared band and a functional film with a low emissivity in the infrared band, which is the key to improving the efficiency of light-to-heat conversion for solar collectors. With the continuous development of solar heat utilization requirements and technology, the application range of solar collector tubes has been developed from low temperature applications (≤100°C) to medium temperature applications (100°C-350°C) and high temperature applications (350°C-500°C). Meet the requirements of medium and high temperature applications such as seawater desalination and solar power generation. The selective absorption c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B32B15/04B32B9/04B32B33/00C23C14/35C23C14/08
Inventor 刘雪莲陈步亮张秀廷杨兴
Owner 北京天瑞星光热技术有限公司
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