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High-temperature solar selective absorbing coating with SiO2 and Cr2O3 double-ceramic structure and preparation method thereof

A technology for absorbing coating and solar energy, applied in the field of solar energy utilization, can solve the problems of unstable microstructure and physical properties, low deposition rate, long production cycle, etc., and achieve stable microstructure and physical properties, simple preparation process, and easy operation. handy effect

Active Publication Date: 2013-03-20
北京天瑞星光热技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the microstructure and physical properties of cermet structural coatings are unstable at high temperatures due to the large number of metal atoms.
Moreover, the deposition rate of processes such as radio frequency sputtering is low, the production cycle is long, the process is complicated, and the cost is high

Method used

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  • High-temperature solar selective absorbing coating with SiO2 and Cr2O3 double-ceramic structure and preparation method thereof
  • High-temperature solar selective absorbing coating with SiO2 and Cr2O3 double-ceramic structure and preparation method thereof

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preparation example Construction

[0026] The invention provides a kind of SiO 2 and Cr 2 o 3 The preparation method of the double ceramic structure high temperature solar energy selective absorption coating, such as figure 2 shown, including the following steps:

[0027] Step 1: preparing the first infrared emitting layer on the substrate;

[0028] A pure metal target DC or intermediate frequency magnetron sputtering method is adopted. The pure metal target is Cu target or Ag target (purity 99.99%), prepared with Ar gas as the sputtering gas, and the substrate is made of high-speed steel. Before sputtering, the vacuum chamber was pre-evacuated to a background vacuum of 4×10 -3 ~5×10 -3 Pa, the inert gas Ar gas is introduced as the sputtering atmosphere, the Ar gas flow rate is 100-140sccm, the sputtering distance is adjusted to 130-150mm, and the sputtering pressure is adjusted to 3×10 -1 ~4×10 -1 Pa. Turn on the power supply of the sputtering target of the pure metal target, adjust the sputtering vol...

Embodiment 1

[0035] This embodiment provides a kind of solar energy selective absorption coating, comprises three coatings namely the first layer infrared reflection layer, the second layer absorption layer, the third layer anti-reflection layer, the thickness of the first layer is 200nm, the second layer is total The thickness is 150nm, the thickness of the first sublayer is 90nm, the thickness of the second sublayer is 60nm, and the SiO in the first sublayer 2 The volume percentage is 60%, the second sublayer SiO 2 The volume percentage is 40%, and the thickness of the third layer is 60nm. The preparation steps are as follows:

[0036] Step 1: preparing the first infrared emitting layer on the substrate;

[0037] The Cu target with a purity of 99.99% is selected, and the base material is high-speed steel. Before sputtering, the vacuum chamber was pre-evacuated to a background vacuum of 4.5×10 -3 Pa, the inert gas Ar is introduced as the sputtering atmosphere, the Ar gas flow rate is ...

Embodiment 2

[0045] The present embodiment provides a kind of SiO 2 and Cr 2 o 3 The dual-ceramic structure high-temperature solar selective absorption coating, which includes three layers of film, from the bottom to the surface is an infrared reflection layer, an absorption layer and an anti-reflection layer;

[0046] The first infrared reflective layer is a Cu or Ag film, located on the surface of the substrate, with a thickness of 50nm; the second absorbing layer includes two sublayer structures, both of which are SiO 2 +Cr 2 o 3 film, the thickness of the first sublayer and the second sublayer are both 50nm, and the SiO in the first sublayer 2 The volume percentage is 50%, the second sublayer SiO 2 The volume percentage is 30%, wherein the first sublayer is adjacent to the first infrared reflection layer, the second sublayer is adjacent to the third antireflection layer; the third antireflection layer is SiO 2 film with a thickness of 40 nm.

[0047] The present embodiment provi...

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Abstract

The invention provides a high-temperature solar selective absorbing coating with a SiO2 and Cr2O3 double-ceramic structure and a preparation method thereof, belonging to the technical field of solar energy utilization. The coating sequentially comprises an infrared reflection layer, an absorbing layer and an anti-reflection layer from the bottom to the surface, wherein a first layer, namely the infrared reflection layer is a Cu or Ag film with the thickness of 50-250 nm; a second layer, namely the absorbing layer consists of two sub-layers, both the two sub-layers are a SiO2 and Cr2O3 film, and both the first sub-layer and the second sub-layer have the thickness of 50-100 nm; and a third layer namely the anti-reflection layer is a SiO2 film with the thickness of 40-80 nm. The coating provided by the invention has the characteristics of high absorption rate of visible-infrared spectroscopy and low emissivity of infrared spectroscopy; because of the reduction of metal atoms, the novel high-temperature selective absorbing coating with the double-ceramic structure has good thermal stability at medium and high temperature; and the preparation process of the coating is simple, is convenient to operate, is easy to control, and shortens the production cycle.

Description

technical field [0001] The invention belongs to the technical field of solar energy utilization, in particular to a 2 and Cr 2 o 3 High-temperature solar selective absorption coating with double ceramic structure and preparation method thereof. Background technique [0002] The solar spectrum selective absorption coating has a high absorption rate in the visible-near-infrared band and a functional film with a low emissivity in the infrared band, which is the key to improving the efficiency of light-to-heat conversion for solar collectors. With the continuous development of solar heat utilization requirements and technology, the application range of solar collector tubes has been developed from low temperature applications (≤100°C) to medium temperature applications (100°C-350°C) and high temperature applications (350°C-500°C). Meet the requirements of medium and high temperature applications such as seawater desalination and solar power generation. The selective absorpti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/08C23C14/34
Inventor 刘雪莲陈步亮王静施伟
Owner 北京天瑞星光热技术有限公司
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