Temperature-controlled inflatable vacuum radiation equipment

A vacuum and equipment technology, applied in the field of radiation experiments, to achieve the effect of preventing severe frosting, preventing air leakage, and good experimental results

Active Publication Date: 2012-02-01
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the existing electronic component radiation experiment technology, there is no suitable equipment that can accurately provide different composition gas atmosphere and temperature environment for the radiation experiment of electronic components at the same time

Method used

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  • Temperature-controlled inflatable vacuum radiation equipment
  • Temperature-controlled inflatable vacuum radiation equipment
  • Temperature-controlled inflatable vacuum radiation equipment

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Embodiment Construction

[0035] figure 1 Shown is a temperature-controlled inflatable vacuum radiation device 100 according to a preferred embodiment of the present invention, which is used to accurately provide the required temperature and gas composition environment for the radiation experiment of electronic components.

[0036] In the irradiation device 100, the irradiation cavity 112 is defined by a cover 110 with one end open. A device tray 114 for carrying electronic components to be tested (not shown in the figure) is removably accommodated in the irradiation chamber 112 . An openable and closable cover structure 120 is connected to the open end of the cover body 110 to hermetically seal the irradiation chamber 112 when the cover structure is closed. The cable joint 125 fixed on the cover structure 120 may include one or more DC joints and / or radio frequency joints, which pass through the cover structure into the irradiation chamber 112, so as to realize the Electrical and signal connections ...

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Abstract

The invention relates to temperature-controlled inflatable vacuum radiation equipment used in an electronic component radiation experiment, comprising a hood body which defines a radiation cavity, a device plate which carries an electronic component to be contained in the radiation cavity, a seal cover structure which can be opened and closed, a wire and cable connector which is fixed on the seal cover structure, a temperature control system and an vacuumizing inflation system; an open end of the seal cover structure, which is connected onto the hood body, seals the radiation cavity with air when being closed; the temperature control system comprises a temperature control board in the radiation cavity and a refrigerant input and discharge pipe which passes through the seal cover structure; a refrigerant chamber of the temperature control board receives and discharges refrigerant through the refrigerant input and discharge pipe, and an electric heating device of the refrigerant chamber is electrically connected to the wire and cable connector; and the vacuumizing inflation system comprises a vacuumizing inflation pipeline which passes through the seal cover structure and a first valve device outside the radiation cavity, so that the radiation cavity is vacuumized or inflated through the valve device and the vacuumizing inflation pipeline. The radiation equipment can provide various temperature and gas component environments for the accuracy of the electronic component radiation experiment, so that the needs of a research on the electronic component radiation effect are met.

Description

technical field [0001] The invention relates to the radiation experiment technology of electronic components such as integrated circuits, and more specifically relates to a temperature-controlled inflatable vacuum radiation device. Background technique [0002] With the rapid development of aerospace technology and nuclear energy technology, various electronic components are increasingly used in different nuclear radiation and space radiation environments. The total dose effect caused by the radiation environment on electronic components will seriously affect the reliability and service life of electronic equipment. Over the years, major countries in the world have been actively carrying out research on the total radiation dose effect of electronic components and the corresponding reinforcement technology. [0003] The total dose effect hardening level of electronic components is one of the important indicators of radiation-resistant electronic components. Recent studies h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G21K5/00H01L21/67G01R31/26
Inventor 曾传滨毕津顺刘刚罗家俊韩郑生
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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