Reflectance distribution curve modeling method, thickness measurement scheme and thickness measurement reflectometer using same
A modeling method and degree distribution technology, which is applied in the direction of semiconductor/solid-state device testing/measurement, instruments, measuring devices, etc., can solve problems such as inconsistencies, and achieve the effect of precise detection
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0022] Referring to the accompanying drawings, the modeling method of the reflectance distribution curve of the present invention, the thickness detection method using the method, and the embodiments of the thickness detection reflectometer will be described in detail below.
[0023] figure 1 is a schematic diagram of an embodiment of the thickness detection reflectometer of the present invention; figure 2 is through figure 1 The intensity distribution curve of the light in the bandpass of the linear variable filter of the thickness detection reflectometer; Figure 7 is a diagram illustrating an example of the surface shape of the inspected film layer.
[0024] Please refer to figure 1 , figure 2 and Figure 7 , the thickness detection reflectometer 100 of this embodiment includes a light source 110 , a linear variable filter 120 , a filter transfer unit 130 , a condenser lens 160 , an optical system 140 and an imaging unit 150 .
[0025] The light source 110 is used t...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com