Liquid raw material vaporizer

Abstract

A liquid raw material vaporizer which minimizes the bloating of bubbles by preventing recombination of bubbles and equalizes the temperature distribution of stored liquid raw material comprises a liquid raw material container (2), a first heater (3) mounted on the sidewall of the liquid raw material container (2) in order to heat the stored liquid raw material to a predetermined temperature, a second heater (4) provided at the central part in the liquid raw material container (2) in order to heat the stored liquid raw material to a predetermined temperature, a plurality of bubble generators (5) provided between the second heater (4) and the sidewall while being immersed in the stored liquid raw material in order to bubble the liquid raw material by discharging carrier gas into the liquid raw material, and a gas supply pipe (6) which supplies carrier gas to the bubble generators (5).

Description

technical field [0001] The present invention relates to a liquid raw material gasification device for gasifying a liquid raw material by a bubbling method using a carrier gas. Background technique [0002] For example, as shown in Patent Document 1, this liquid raw material gasification device includes: a liquid raw material container for storing the liquid raw material; a carrier gas introduction tube for bubbling the liquid raw material stored in the liquid raw material container with the carrier gas ; The bubbling gas output pipe is connected with the upper space (gas phase) of the liquid raw material container, and is used to provide the bubbling gas to the outside of the liquid raw material container. The front end of the carrier gas introduction tube is immersed in the liquid raw material, and a bubbling nozzle composed of a plurality of thin tubes is connected to the front end. While the bubbles generated by the bubbling nozzle are floating in the liquid raw material...

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Problems solved by technology

[0003] However, the above raw material gasification device has a problem that the bubbles generated by the bubbling nozzle adhere to the surface inside the liquid raw material container or the components in the container, and the bubbles recombine to make the bubbles larger.

If the bubbles become larger, the proportion of liquid raw materials vaporized in the bubbles will become smaller, and the liquid raw materials cannot be saturated in the bubbles, resulting in lower gasification efficiency.

[0004] In addition, if it is a large liquid raw material container, since the movement area of ​​the air bubbles generated by the bubbling nozzle is limited to a part of the area, the stirring effect of the air bubbles on the liquid raw material cannot be obtained, and it is difficult to maintain the temperature distribution of the liquid raw material. uniform problem

In addition, if the liquid raw material container is enlarged, it is difficult to heat the liquid raw material so that the temperature of the liquid raw material is uniformly distributed when only the heater is provided on the outer surface of the liquid raw material container.

Here, although it is also conceivable to arrange the bubbling nozzle so that the air bubbles collide with the inner surface of the liquid material container to stir the liquid material, as described above, the following problem will occur: the air bubbles adhere to the inner surface of the liquid material container. , so that the bubbles recombine, causing the bubbles to become larger

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