Gas sensor
A gas sensor and gas technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problem of limited possibility of detecting non-hydrogen-containing substances
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[0089] performed an experiment in which a pair of O 2 Sensitive field-effect sensors with pairs of O without this hydrogen-inert layer 2 Sensitive field effect sensors for comparison. Both field effect sensors were subjected to CO and H in a background of 5% oxygen in nitrogen 2 (concentration range 250 to 1250ppm) pulse. Furthermore, the sensors including the MgO layer were also subjected to 1%, 2%, 5%, 10% and 15% oxygen pulses in a nitrogen background. The results are shown in Figure 7 middle.
[0090] It is evident from these results that the O including the hydrogen-inert insulating layer made of MgO 2 sensor for H 2 Pulse insensitive ( Figure 7 curve (b) in ), without the O 2 The sensor is subjected to H 2 The severe impact of the pulse ( Figure 7 The curve in (a)). Furthermore, it can be seen that the O including the hydrogen-inert insulating layer made of MgO 2 sensor when subjected to O 2 Good response when pulsed.
[0091] Thus, these results clearly...
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