Three-dimensional shape measuring device

A three-dimensional shape, measuring device technology, used in measuring devices, using optical devices, charging systems, etc.

Active Publication Date: 2012-04-04
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0022] However, in the configurations of each of the above-mentioned conventional documents, it is impossible to measure, for example, the lens surface and the side surface of an aspheric lens with the required accuracy, that is, the lens surface is 10 to 100 nanometers, and the side surface is 100 nanometers.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0103] figure 1 It is an enlarged front view of the first movable part 1 and the second movable part 2 including the movable inclined part 2i of the three-dimensional shape measuring device according to the first embodiment of the present invention. figure 2 is a front view of the shape measuring device according to the first embodiment of the present invention, image 3 It is a right side view of the shape measuring device according to the first embodiment of the present invention. Figure 4 It is an explanatory diagram showing an example of the control structure when measuring the upper surface 7a of the measurement object 7 with the upper surface contactor 1a of the shape measuring apparatus according to the first embodiment of the present invention. Figure 5 It is an explanatory diagram showing an example of the control configuration when measuring the side surface 7b of the measurement object 7 with the side contact 2ia of the shape measuring device according to the fi...

no. 2 approach

[0186] Figure 8A and Figure 8B A laser light path used for XYZ coordinate measurement of the second embodiment of the present invention is shown.

[0187] and Figure 7A and Figure 7B It can be seen that Figure 8A and Figure 8B Here, instead of the Y reference mirror 13, a long Y reference mirror 22 longer than the Y reference mirror 13 is installed, and a steady laser 23 for side Y coordinate measurement is added. This is because, Figure 7A and Figure 7B In the structure of , the XY drive unit 8 only needs to move without tilting at all, but if it tilts due to swaying, an error occurs in the Y coordinate measurement data, so the Y coordinate is measured on the axis of the side contact 2ia. Also, the long Y reference mirror 22 needs to be longer than the Y reference mirror 13 by an amount corresponding to the distance between the top contact 1a and the side contact 2ia. In addition, it has been explained to use a plurality of half-mirrors to separate the steady-...

no. 3 approach

[0192] As described in the first embodiment, when measuring with the side contact 2ia, the Z coordinate of the upper contact 1a is used as the Z2 position, and the upper contact 1a and the pneumatic slider 1c are weak in the Z-axis direction. Acceleration and the like during the action of the movable part 2 sometimes produce, for example, vibrations of about 200 nanometers ( Figure 9A ).

[0193] In this case, it is necessary to newly install an air slider vibration stop device 82 functioning as an example of the first movable part operation stop device as follows, and the air slider vibration stop device 82 prevents The movement of the air slider 1c in the Z-axis direction can prevent the vibration of the air slider 1c. For example, as a pneumatic slider vibration stop device 82 such as Figure 4 , Figure 5 and Figure 9AAs shown, a switching valve 43 is provided on the piping 83 that supplies compressed air to the air bearing 2a, and the switching valve 43 is connected...

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Abstract

The invention provides a three-dimensional shape measuring device. An upper contact (1a) is capable of scanning and measuring the upper part (7a) of a measured object (7) along XY directions through a pneumatic slide block 1 in a non-vibration manner and further measuring the Z coordinate with excellent precision by means of a first reflecting mirror (1b) and a lens (2de). A side contact (2ia) which can also move on the XY directions can not vibrate in the Z direction. Therefore, the side contact can scan and measuring the side surface (7b) of the measured object. The Z coordination measurement of the side contact (2ia) can be achieved by means of the Z coordinate measuring value of the first reflecting mirror (1b). The XY displacement of the side contact can be measured with high precision by means of an inclined angle measuring part (2j).

Description

technical field [0001] The invention relates to an ultra-high-precision three-dimensional shape measuring device with an accuracy of 10-100 nanometers. In particular, the three-dimensional shape measuring device according to the present invention can scan and measure the lens surface and outer diameter of an aspheric lens used in a camera, video camera, or optical disk with ultra-high precision on the order of 10 to 100 nanometers, and then measure The lens surface is shifted from the center of the outer diameter. In addition, it is possible to scan and measure three-dimensional measuring objects such as the gap between the released male mold and the female mold, the shape of microholes, gears, and reference surfaces. Background technique [0002] If the aspheric lens cannot be manufactured with a shape accuracy of 1 / 10,000th of a millimeter, that is, less than 100 nanometers, it will not be able to exhibit performance. Therefore, until about 1980, it has not been manufactur...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCF02M25/0809G01B11/2408G01B11/255
Inventor 吉住惠一久保圭司舟桥隆宪土居正照
Owner PANASONIC CORP
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