Holographic inversion detection method for micro-cracks on damaged layer of subsurface of brittle material

Abstract

The invention discloses a holographic inversion detection method for micro-cracks on a damaged layer of the subsurface of a brittle material. The invention is characterized in that: the surface of the brittle material after corrosion is reconstructed by using the method of fractal interpolation; the principle of self-similarity in the theory of fractal interpolation is adopted to fully depict complex microscopic morphology of the surface after corrosion; on the basis of reconstructing the material surface after corrosion by using the method of fractal interpolation, the finite difference method is used for inversion modeling of formation and growth of micro-cracks on the damaged layer of the subsurface, which enables not only the depth of the micro-cracks on the damaged layer of the subsurface but also all the information like size and direction of the micro-cracks to be obtained. An overall, complete and comprehensive characterization system of holographic distribution characteristics of micro-cracks on the damaged layer of the subsurface is brought forward on the basis of obtainment of holographic distribution characteristics of micro-cracks on the damaged layer of the subsurface.

Description

technical field [0001] The invention relates to the field of material surface quality detection, in particular to a method for detecting microcracks in subsurface damaged layers of brittle materials. Background technique [0002] High-precision (nanoscale) components involve ultra-precision processing, precision detection technology, optics and semiconductor fields in terms of technology, and high-end fields such as energy, space, defense equipment, integrated circuits and MEMS in terms of application. With the development of optics, microelectronics, MEMS and related technologies, the requirements for the surface quality of brittle materials involved in components are getting higher and higher. Whether it is high-end optical components or VLSI substrate materials, the surface integrity High requirements are put forward for the precision, which requires to ensure the processing quality of high-precision components to the greatest extent in the processing process. [0003] L...

AI Technical Summary

Problems solved by technology

However, due to the lack of quantitative characterization methods for the surface morphology after corrosion, it can only be used to estimate the depth information of the subsurface damage layer and observe the three-dimensional morphology characteristics of the microcracks after corrosion, and cannot reflect the real microcracks of the subsurface damage layer before corrosion. Distribution characteristics

So far, as an important indicator of the surface quality of high-precision components, the relevant detection and characterization methods for microcracks in the subsurface damage layer are limited to the measurement of thickness and the characterization of microcrack information on a certain cut surface. 3D holographic distribution characteristics of cracks

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