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Gas floating cushion for gas floating bearing

A technology of air bearings and air bearings, applied in the field of air bearings, which can solve the problems of no flexible connection, adjustment, and inability to adjust the thickness of the air film, so as to increase the hardness and wear resistance and reduce the impact

Active Publication Date: 2014-03-26
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this invention, bolts are used to connect the air cushion and the moving platform (slider), and there is no flexible connection inside, so the thickness of the air film cannot be adjusted.

Method used

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  • Gas floating cushion for gas floating bearing
  • Gas floating cushion for gas floating bearing
  • Gas floating cushion for gas floating bearing

Examples

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Embodiment Construction

[0029] The following will combine Figure 1 ~ Figure 3 The air bearing pad for air bearing of the present invention will be further described in detail.

[0030] The air bearing pad used in the air bearing of the present invention includes an upper support, a lower support and a connecting part;

[0031] One end of the connecting part is movably connected with the upper support, and the connecting part can move within a certain range relative to the upper support;

[0032] The other end of the connecting member is connected to one end of the lower support, and the end surface of the other end of the lower support is an air floating surface;

[0033] The movement of the connecting part relative to the upper support drives the movement of the lower support, thereby changing the distance between the air bearing surface and the guide rail.

[0034] The air bearing pad for air bearing of the present invention is now described in detail with a preferred embodiment:

[0035] see ...

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PUM

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Abstract

The invention discloses a gas floating cushion for a gas floating bearing, which is used for connecting a sliding block with a guide rail, and comprises an upper supporting seat, a lower supporting seat and a connecting component. One end of the connecting component is movably connected with the upper supporting seat; the connecting component can move in a certain range with respect to the upper supporting seat; the other end of the connecting component is connected with one end of the lower supporting seat; the end surface of the other end of the lower supporting seat is a gas floating surface; and the lower supporting seat is driven to move by the movement of the connecting component with respect to the upper supporting seat, thereby changing an air gap between the gas floating surface and the guide rail. The gas floating cushion for the gas floating bearing, which is provided by the invention, can be used for regulating the thickness of a gas film when the gas floating bearing works, so that the gas floating rigidity reaches an optimal value.

Description

technical field [0001] The invention relates to an air bearing, in particular to an air bearing for an air bearing. Background technique [0002] Air bearing is the key component of ultra-precision measurement and processing system, which has the advantages of cleanness and no friction. With the development of air bearing applications such as nanotechnology, advanced optical devices and integrated circuits, higher requirements are put forward for the static performance and positioning accuracy of air bearings. [0003] Stiffness characteristics are one of the important indicators to measure air bearings. An important factor affecting the stiffness characteristics is the thickness of the air film. From the relationship curve between the stiffness of the air bearing and the thickness of the air film, it can be seen that the air bearing The stiffness of is a curve that first increases and then decreases. Therefore, there is an optimal air film thickness value to maximize the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16C32/06F16C33/00
Inventor 葛黎黎王茜
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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