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Hydrogen sensor

A sensor and pressure sensor technology, applied in the field of hydrogen sensors, can solve problems such as the increase of pressure in the detection chamber, and achieve the effects of short time constant, high sensitivity and long service life

Active Publication Date: 2012-05-16
INFICON INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The pressure in the detection chamber increases because the hydrogen reaches the aspirator only with a delay due to the throttling channel

Method used

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Embodiment Construction

[0028] The hydrogen gas sensor has a pressure-tight housing 10 which is closed at one end by a carrier part 11 made of silicon and at the opposite end by a second carrier part 12 made of silicon. The carrier forms an end wall of the housing. The housing 10 comprises the smallest possible gas volume.

[0029] The first carrier 11 is a plate made of silicon material, the thickness of which is so great that the plate can withstand atmospheric pressure. The first carrier 11 is provided with a large number of through-throughs 13 . These are holes that pass through. A membrane 14 made of palladium is located on the outer side of the first carrier 11 . The membrane is a thin film with a thickness of approximately 1 μm.

[0030] On the inner side of the housing there is provided a carrier 11 with a recess 15 which is surrounded by a raised edge 16 . The membrane 14 can be heated by direct current, or the membrane can be provided with an additional heating layer. Another possibil...

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Abstract

A hydrogen sensor comprises a housing (10), which is closed off by a membrane (14) that is made of palladium and selectively only pervious to hydrogen. The housing is evacuated and contains a Pirani pressure sensor (22). The membrane (14) and the Pirani pressure sensor (22) are each attached to a carrier (11, 12). Both carriers are joined directly next to one another or kept at a distance by a connection piece (25). The hydrogen sensor has a high sensitivity and a low response time due to the relatively large membrane surface and the low housing volume. It can be produced in a small size and integrated in the handle of a sniffer-type leak indicator.

Description

technical field [0001] The invention relates to a hydrogen sensor with a pressure-tight housing which is closed by a palladium membrane and which includes a pressure sensor. Background technique [0002] Such a hydrogen sensor is described in WO 2006 / 008253 A1 (Inficon). The hydrogen gas sensor has a membrane that selectively lets hydrogen gas pass through and closes a pressure-tight housing. The housing comprises a Penning pressure sensor with two parallel cathode plates between which an anode ring is arranged. A voltage source provides a DC voltage, which is applied between the cathode plate and the anode ring. The magnetic fields necessary for Penning discharges are generated by permanent magnets mounted outside the enclosure. An aspirator pump is connected to the housing, which aspirates hydrogen and reduces the hydrogen partial pressure. The detection chamber of the casing is connected with the suction pump through a throttling passage. If hydrogen enters the detec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N7/10
CPCG01N15/00
Inventor 丹尼尔·韦齐希
Owner INFICON INC
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