The invention belongs to the technical field of
optical fiber gas sensing, and relates to a micro-mirror type
optical fiber hydrogen sensor based on gradient
tantalum-
ruthenium alloy and a manufacturing method of the micro-mirror type
optical fiber hydrogen sensor. The sensor comprises an optical
fiber base body, a
titanium adhesion layer arranged on the end face of the optical
fiber base body, a partitioned
tantalum-
ruthenium alloy sensing layer arranged on the
titanium adhesion layer, a catalytic covering layer arranged on the partitioned
tantalum-
ruthenium alloy sensing layer and a
polymer protection layer arranged on the catalytic covering layer. The partitioned tantalum-ruthenium alloy sensing layer comprises at least three independent regions, and ruthenium atom content gamma values of the independent regions are different, so that wide-range
hydrogen detection is realized. The tantalum-ruthenium alloy sensing layer, the
titanium adhesion layer, the catalytic covering layer and the
polymer protection layer are integrated on the end face of the optical
fiber, the ultra-wide detection range of
hydrogen partial pressure from 10 <-1 > Pa to 106 Pa is achieved, seven orders of magnitudes are spanned, the
response time is smaller than or equal to 30 s, the
detection limit reaches 0.1 Pa, the measurement accuracy and
repeatability are ensured, and the application range is wide. And the problem of high-concentration saturation or film
cracking of a traditional Pd-based sensor is avoided.