Seed-crystal transmission gear

Abstract

The invention relates to a seed-crystal transmission gear, belonging to the technical field of vacuum equipment. The seed-crystal transmission gear comprises a seed shaft, a water-electricity connection mechanism, a weighing mechanism, an adjusting platform and a supporting mechanism, wherein a leadscrew-nut structure connected with a fixed support of the adjusting platform is arranged on the supporting mechanism, and a lead screw is connected with a second output shaft of an electric motor; and the seed-crystal transmission gear further comprises an auxiliary drive mechanism which is connected with the lead screw, and the manual operation is available during the interruption of a power supply. In the invention, a structure with combination of a conducting slip ring and a rotating joint is used in the water-electricity connection mechanism, so that the connection between electricity and water is realized during the autorotation of a seed rod. An expansion-joint seal structure is used in the weighing mechanism, such that a weighing sensor can choose the measuring ranges properly according to actual samples, and the weighing sensor in the atmosphere can measure the weights of the samples in vacuum precisely. Double guide rails and a slider are used in the precision adjustment to ensure flexible movement; the use of a micrometer head not only leads to the more convenient operation, but also realizes the vernier adjustment and the precision adjustment. A structure of aluminum profiles is used in the supporting mechanism, such that the weight is lightened effectively, and the supporting mechanism is beautiful overall.

Description

technical field [0001] The invention belongs to the technical field of vacuum equipment, in particular to a seed crystal transmission device. Background technique [0002] At present, the function of the seed rod transmission mechanism of the known single crystal furnace equipment is relatively single, and the method is cumbersome, such as: a: in the weighing mechanism, because the weighing sensor under the atmosphere will measure the weight of the sample in the vacuum, many The method of measuring the overall mechanism is adopted, so that the selection of the load cell is far greater than the weight of the actual sample; b: In order to ensure the strength of the overall mechanism, carbon steel or stainless steel is selected as the material, and the weight is increased and it is not beautiful at the same time ; c: when the seed rod rotates, the connection of water and electricity is mostly realized by the shaft seal assembly, which not only becomes huge in structure but also...

AI Technical Summary

Problems solved by technology

[0002] At present, the function of the seed rod transmission mechanism of the known single crystal furnace equipment is relatively single, and the method is cumbersome, such as: a: in the weighing mechanism, because the weighing sensor under the atmosphere will measure the weight of the sample in the vacuum, many The method of measuring the overall mechanism is adopted, so that the selection of the load cell is far greater than the weight of the actual sample; b: In order to ensure the strength of the overall mechanism, carbon steel or stainless steel is selected as the material, and the weight is increased and it is not beautiful at the same time ; c: when the seed rod rotates, the connection of water and electricity is mostly realized by the shaft seal assembly, which not only becomes huge in structure but also inconvenient for installation and maintenance; d: cannot be fine-tuned when adjusting the seed rod And the operation is inconvenient and flexible; e: the seed crystal transmission mechanism cannot be used when the power is off

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