Positive photosensitive resin composition, cured film, method for forming the same, interlayer insulating film, and display device
A photosensitive resin and composition technology, applied in optics, optomechanical equipment, nonlinear optics, etc., can solve the problems of low dielectric constant and no photosensitive resin found.
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[0455]
[0456] A photosensitive resin composition is prepared by mixing various components at a predetermined ratio by an arbitrary method, stirring and dissolving them. For example, it is also possible to prepare a resin composition by preparing a solution obtained by dissolving each component in the (E) solvent in advance, and then mixing them at a predetermined ratio. The composition solution prepared in this manner can also be used after being filtered through a filter with a pore size of 0.2 μm or the like.
[0457]
[0458]A desired dry coating film can be formed by applying a photosensitive resin composition to a predetermined substrate and removing the solvent by reducing pressure and / or heating (prebaking). As the substrate, for example, in the manufacture of a liquid crystal display element, a glass plate provided with a polarizing plate, further provided with a black matrix layer, a color filter layer, and further provided with a transparent conductive circuit ...
example
[0483] The following examples are given to further describe the present invention in detail. Materials, usage amounts, ratios, processing contents, processing procedures, etc. shown in the following examples can be appropriately changed unless departing from the spirit of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below.
Synthetic example 1
[0485] Diethylene glycol ethyl methyl ether (manufactured by Toho Chemical Industry Co., Ltd., HissolveEDM, 45 g) was added as a solvent to the three-necked flask, and the temperature was raised to 90° C. under a nitrogen atmosphere. In this solution, methyl methacrylate (MMA, manufactured by Wako Pure Chemical Industries, 3.27 g), 2-tetrahydrofuryl methacrylate (MATHF, synthetic product, 22.17 g), and hydroxyl group methacrylate were dissolved as monomer components. Ethyl ester (HEMA, manufactured by Wako Pure Chemical Industries, 6.57 g), 3-ethyl-3-oxetanylmethyl methacrylate (OXE-30, manufactured by Osaka Organic Chemical Industry, 20.26 g) and n-butoxymethyl Acrylamide (NBMA, manufactured by Tokyo Chemical Industry, 9.43 g), and 2,2'-azobis(2-methylpropionic acid) dimethyl (V-601, manufactured by Wako Pure Chemical Industries, Ltd., 7.36 g) as a polymerization initiator g, 8 mol% with respect to the monomer), it was dripped over 2 hours. It stirred for 2 hours after compl...
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