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Method for highly precisely eliminating adjustment error in spherical surface shape interference detection

A technology for interference detection and error adjustment, applied to measuring devices, instruments, optical devices, etc., can solve problems such as defocus errors that have not yet been removed

Active Publication Date: 2012-07-18
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with the decrease of F / # of the inspected surface and the improvement of precision requirements, the traditional method cannot remove the influence of defocus error with high precision.
At present, there is no suitable high-precision defocusing method

Method used

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  • Method for highly precisely eliminating adjustment error in spherical surface shape interference detection
  • Method for highly precisely eliminating adjustment error in spherical surface shape interference detection
  • Method for highly precisely eliminating adjustment error in spherical surface shape interference detection

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0073] Detect the surface shape of the caliber φ=37mm radius of curvature R=25mm spherical mirror, and process the detection result with the inventive method to obtain the final surface shape process as follows:

[0074] 1) The number of pulses generated by moving from the center of the sphere to the apex of the sphere measured by single-frequency laser interferometry is 317573 (the wavelength of the laser used is 632.8nm), so .

[0075] 2) Use the GPI interferometer of Zygo Company to measure the surface shape data of the tested spherical surface , the laser wavelength used by the interferometer .

[0076] 3) Transform the surface shape data into the global coordinate system, and calculate the pose transformation matrix by the least square method and ideal face radius change .

[0077]

[0078]

[0079] 4) Calculate the surface shape value after defocusing according to step 10.

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Abstract

The invention discloses a method for highly precisely eliminating an adjustment error in spherical surface shape interference detection. In the method, adjustment error-containing wave surface data is obtained by an interferometer, the curvature radius and the caliber of a spherical surface to be measured are measured, and then data obtained by measurement serves as auxiliary data for eliminating the adjustment error, wherein the radius of the spherical surface to be measured is measured by a single-frequency laser interference method; the caliber is measured by using a vernier caliper; the adjustment error is moved by adopting an optimum fit ideal spherical model; the position and the radius of the ideal spherical surface are found by the model; and the wave surface measured by the interferometer is moved so that the center of the wave surface is overlapped with the sphere center of the ideal spherical surface. The invention provides a new method for eliminating the adjustment error in the spherical surface shape detection of an optical element by researching spherical interference detection; and the method has important application value on the detection and the machining of high-precision optical elements.

Description

technical field [0001] The invention relates to the technical field of interference detection of optical elements, in particular to a method for eliminating adjustment errors with high precision in spherical surface shape interference detection. Background technique [0002] With the development of optical manufacturing technology, the requirements for the detection accuracy of optical spherical surface are getting higher and higher. Spherical surface interference detection technology can quickly realize the high-precision detection of spherical optical element surface shape, so the spherical surface shape interference detection technology has been continuously improved and widely used. In the actual interference test, the position of the tested spherical surface is detected at the zero position by adjusting the mechanism, but the actual mechanism is not ideal, so that the test results will always include adjustment errors such as defocus errors and tilt errors. For this r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 张金春汪凯巍白剑吴永前
Owner ZHEJIANG UNIV
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