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Capacitance-type force sensor

A force sensor and electrostatic capacitance technology, applied in the field of electrostatic capacitance force sensors, can solve the problems of shape change, material change, poor detection accuracy, poor recovery, etc., and achieve the effects of good stability, good detection accuracy and simple structure

Inactive Publication Date: 2012-07-18
FANUC LTD
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  • Abstract
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  • Claims
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Problems solved by technology

In the case where the sensor body is made of an elastic body, it is difficult to make a sensor that detects a strong force because it cannot withstand a large force. In addition, since the sensor body is deformed by force, the recovery is poor, so the detection accuracy is poor.
Since the thermal expansion of the elastic body due to temperature is large, the shape change with time and the material change are large, so it is not possible to realize a force sensor with good accuracy

Method used

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Examples

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no. 1 approach

[0026] The capacitive force sensor 1 of this embodiment includes a fixed part 10 mounted and fixed on an external device (not shown) such as a robot arm, and a load mechanism (such as a chuck or a robot arm) that receives a force applied from the outside. The mounting portion 16 and the load transmission portion 14 are connected to the load mounting portion 16 to transmit the applied force. The elastic portion 12 is formed between the load transmitting portion 14 and the fixing portion 10, and the elastic portion 12 is elastically deformed by a force applied from the outside, and the load transmitting portion 14 is displaced.

[0027] The properties of the elastic portion 12 are very important in determining the properties of the force sensor. The detection sensitivity is low because the displacement becomes small when the strength of the elastic portion 12 is high, but it is not easily damaged even if a large force is applied. Conversely, when the strength of the elastic par...

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Abstract

A capacitance-type force sensor is provided with a fixed plate, a fixed portion on which the fixed plate is mounted, a load transmission portion, and an elastic portion through which the load transmission portion is mounted on the fixed portion. All these members are formed of materials having substantially equal coefficients of linear expansion. Further, a displacement electrode secured to the load transmission portion and a fixed electrode secured to the fixed plate is divided into three or more electrically independent electrodes such that the displacement and fixed electrodes form three or more capacitance elements.

Description

technical field [0001] The present invention relates to an electrostatic capacitive force sensor which detects deformation of a sensor body due to applied force through electrostatic capacitance, calculates and outputs applied force component and torque component according to the detected electrostatic capacitance. Background technique [0002] With the advanced use of robots, in order to properly control the force generated by the robot, force sensors that detect force components and moment components in a plurality of axial directions are required. As such a force sensor, there are strain gauge force sensors and capacitive force sensors. The strain gauge force sensor is a system that detects the strain generated on the sensor body using a strain gauge, and calculates and outputs the applied force component and moment component based on the detected strain. In this method, by detecting the strains in multiple places of the sensor body, it is possible to calculate force com...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/12
CPCG01L5/165G01L1/142G01L1/26
Inventor 坂野哲朗井之上阳一
Owner FANUC LTD
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