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Measurement device for frequency of double-frequency He-Ne laser device and measurement method of measurement device

A technology of frequency measurement and dual-frequency laser, applied in the direction of testing optical performance, etc., can solve problems such as increasing the difficulty of the system, and achieve good anti-interference effect

Inactive Publication Date: 2014-04-16
TSINGHUA UNIV
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Problems solved by technology

Although optical frequency combs have significant advantages in optical frequency measurement, due to the orthogonal polarization characteristics of dual-frequency He-Ne lasers, directly using optical frequency combs to measure their frequencies will greatly increase the difficulty of the system

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  • Measurement device for frequency of double-frequency He-Ne laser device and measurement method of measurement device

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Embodiment Construction

[0020] The structural principle and working principle of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] As shown in the accompanying drawings, a dual-frequency He-Ne laser frequency measurement device of the present invention includes a frequency-stabilized laser system 1 and a dual-frequency laser frequency measurement system 2 connected to each other; the frequency-stabilized laser system 1 includes sequentially connected Tuning laser 101, optical isolator 102 and first fiber collimator 103, and the polarization maintaining fiber coupler 105, the second fiber collimator 106, the second fiber collimator 106, The first 1 / 2 wave plate 107, the first polarization beam splitter cube 108, the first polarizer 111 and the grating 112, the first 1 / 2 wave plate 107 and the first polarizer 111 are connected on the first polarization beam splitter cube 108 On a central axis, the second 1 / 2 wave plate 110 is connect...

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Abstract

The invention relates to a measurement device for the frequency of a double-frequency He-Ne laser device and a measurement method of the measurement device. The measurement device comprises a stable-frequency laser system and a double-frequency laser frequency measurement system, which are connected with each other, wherein the stable-frequency laser system can lock an output laser frequency of a tunable laser device to any comb tooth of an optical-frequency comb, so that an output laser frequency of the tunable laser device can be traced to a rubidium clock frequency standard; the double-frequency laser frequency measurement system beats frequencies of an output laser of the locked tunable laser device and the output laser of a double-frequency He-Ne laser device to be detected; and two cross-polarization laser frequencies can be simultaneously measured. According to the measurement device and the measurement method disclosed by the invention, absolute frequencies of the two cross-polarization lasers of a double-frequency He-Ne laser can be simultaneously measured and the measured result can be traced to the rubidium clock frequency standard, and the anti-interference capability of the measurement system is strong, so that the measurement device and the measurement method are suitable for the frequency measurement and calibration of the double-frequency He-Ne laser device in an industrial environment.

Description

technical field [0001] The invention relates to the technical field of dual-frequency He-Ne lasers, in particular to a dual-frequency He-Ne laser frequency measurement device and a measurement method thereof. Background technique [0002] Dual-frequency laser interferometer has the characteristics of high measurement accuracy, fast measurement speed and strong environmental adaptability. It has important applications in the field of laser precision measurement, especially in industrial production fields such as precision displacement platform positioning. In 1970, Hewlett-Packard first introduced a commercial dual-frequency heterodyne interferometer based on dual-frequency He-Ne lasers for incremental displacement measurement, and its measurement accuracy can reach λ / 16. There are many manufacturers in the market. Performance dual-frequency laser interferometer products. The core component of the dual-frequency laser interferometer is a dual-frequency laser, and its output ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02
Inventor 吴学健尉昊赟朱敏昊周蕾李岩
Owner TSINGHUA UNIV
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