The invention provides a non-contact EMAT (
Electromagnetic Acoustic Transducer) detection method and
system for a micro-
mass sensor. According to the invention, an electrostatic
magnetic field is generated by magnets, sinusoidal
alternating current is introduced into an
excitation coil, a
resonance piece is placed above the
excitation coil, and
resonance is generated when the frequency of the
excitation coil is the same as the intrinsic frequency of the
resonance piece, so that a secondary alternating
magnetic field is induced, and in induction current is generated in a differential detectioncoil; and when a minute
amount of substance to be measured is adsorbed to a sensitive
thin layer covered on the upper surface of the resonance piece, the resonant frequency of the resonance piece drifts, and the substance to be measured is quantitatively measured through calculating the drifting amount of the resonant frequency. The EMAT is introduced, the
acoustic vibration is excited and detected by using
electromagnetic induction so as to realize a non-contact scheme, complex structures such as a micro-
cantilever beam structure are replaced by the simple structure, and the
absolute frequency shift is replaced by the relative
frequency difference between different
modes, thereby reducing disturbance caused by the external environment, and realizing high-precision measurement for the micro-
mass substance.