Method for manufacturing improved humidity sensor
A technology of a humidity sensor and a manufacturing method, applied in the field of sensors, can solve the problems of limited contact area and long response time, etc.
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Embodiment 1
[0026] At first, prepare to make the silicon chip 1 of humidity sensor (as figure 1 (a));
[0027] Fabrication of SiO on the front side 2 Layer 2, such as figure 1 as shown in (b),
[0028] (2) Then sputter metal seed layer 3 on silicon wafer 1, typical seed layer material
[0029] Including TiW / Cu (such as figure 1 (c));
[0030] (3) However, the capacitor electrode plate 4 is electroplated and the redundant seed layer is corroded. Typical electrode plate materials include Au, etc. (such as figure 1 (d));
[0031] (4) Coating polyimide 5 to make capacitor dielectric material (such as figure 1 (e));
[0032] (5) Utilize photolithography technique to make cavity 6 in polyimide, and solidify (as figure 1 (f));
[0033] exist figure 1 In (g), through-silicon vias are formed in the polyimide corresponding to the cavity 6, which can be produced by a wet method or a dry method.
[0034] The three-dimensional image of the fabricated humidity sensor is as follows: figure...
Embodiment 2
[0036] Such as image 3 As shown, multiple cavities were fabricated in the polyimide between the electrode plates along the direction of the electrode plates. The number of cavities is 2 or more. Under the condition of meeting the requirements of lithographic precision, the more the number of cavities and the smaller the opening of the cavities, the better the performance of the sensor should be.
Embodiment 3
[0038] The cavity in embodiment 1 is as Figure 4 As shown, multiple cavities were fabricated in the polyimide between the electrode plates perpendicular to the direction of the electrode plates. The number of cavities is 2 or more. Under the condition of meeting the requirements of lithographic precision, the more the number of cavities and the smaller the opening of the cavities, the better the performance of the sensor should be.
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