Manufacture and application method for graphene transistor and biosensor of graphene transistor
A biosensor and graphene technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of poor selectivity of sensors, achieve high sensitivity, change resistance characteristics, and improve sensitivity and selectivity
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[0030] Below in conjunction with accompanying drawing, the method for making graphene transistor of the present invention, the method for making the biosensor based on graphene transistor, and biosensor application method are further described:
[0031] 1. First, the preparation of graphene crystals. Taking the commonly used chemical vapor deposition method as an example, first deposit a 500nm-thick transition metal layer such as nickel or copper on a silicon oxide / silicon wafer, and use a gaseous organic compound containing carbon atoms such as methane (CH 4 ), acetylene (C 2 h 2 ) and hydrogen as the source of carbon, at a high temperature of 1000 ° C, gaseous organic matter containing carbon atoms is pyrolyzed on metal substrates such as nickel or copper, and the carbon atoms that remove hydrogen atoms are deposited and adsorbed on the metal surface to continuously grow into Graphene. Coat one layer of polymethyl methacrylate (PMMA) on the substrate of grown graphene as ...
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