Movable temperature control system for environmental scanning electron microscope

Abstract

The invention discloses a movable temperature control system for an environmental scanning electron microscope. The system comprises a base of the environmental scanning electron microscope, an operator and an execution terminal. A refrigeration and heating unit is arranged on the operator, and is connected with a temperature controller which is positioned outside the environmental scanning electron microscope. The temperature controller is used for controlling the temperature of the refrigeration and heating unit. The execution terminal is fixed above the refrigeration and heating unit. The refrigeration and heating unit consists of a lower cover plate, an upper cover plate, a Peltier element and two connecting blocks, wherein the lower cover plate is fixed on the operator; the upper cover plate is fixed on the execution terminal; the Peltier element is positioned between the lower cover plate and the upper cover plate; a connecting block is positioned on each of the two sides of thePeltier element; and a temperature sensor is also arranged on the upper cover plate. When the system works, the temperature of the execution terminal is controlled by the temperature controller outside the electron microscope, and requirements on the reliable measurement and operation of a micro-nano sample can be met.

Description

technical field [0001] The invention belongs to the technical field of micro-nano equipment manufacturing, and in particular relates to a movable temperature control system used in an environmental scanning electron microscope. Background technique [0002] An Environmental Scanning Electron Microscope (ESEM) is a type of Scanning Electron Microscope (SEM). It is capable of nanoscale imaging of non-conductive samples or biological samples compared to conventional scanning electron microscopes. When observing a sample, especially an active biological sample, it is necessary to control the temperature around the sample to ensure the characteristics and activity of the sample. The existing temperature control method of the environmental scanning electron microscope is to fixedly install a cooling unit on the sample test bench, so as to achieve the purpose of controlling the temperature of the sample. However, this cooling unit is strictly installed on the sample stage, which ...

AI Technical Summary

Problems solved by technology

Because the size of the observed sample is very small, during the measurement and operation, the temperature of the execution terminal will be rapidly transmitted to the sample, resulting in changes in the characteristics of the sample or damage to the sample

However, the existing temperature control system is large in size and complex in structure, and can only be fixed on the base inside the microscope, and cannot be transplanted to the manipulator to realize the temperature control of the execution terminal

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