Cam-type disc clamping device

Abstract

The invention relates to the technical field of integrated circuits, and in particular discloses a cam-type disc clamping device. The cam-type disc clamping device comprises a cam, a clamp disc and clamping mechanisms, wherein the centre on the lower part of the clamping disc is connected with the cam; the clamping mechanisms are all arranged on the clamping disc; and each clamping mechanism comprises an extension rod, wherein one end of the extension rod is extended into the clamping disc and is contacted with the circumference of the cam, and the other end of the extension rod is upward and is provided with a clamping piece used for clamping a disc object. By using the device, the disc object can be clamped conveniently and rapidly; and moreover, the device is simple in structure, low in cost and easy to implement.

Description

technical field

[0001] The invention relates to the technical field of integrated circuits, in particular to a cam-type disc clamping device. Background technique

[0002] In the production process of integrated circuits, clamping discs, such as wafers and silicon wafers, is an important link in each production stage. Traditional methods mostly use complex mechanical linkages to grip and move the grippers. The three most important phases of fixing the clamp include: loading the disc, when the clamp is open; rotating the disc, when the clamp is clamping the disc; unloading the disc, At this moment, the clamping part is in the open state. This more traditional method of clamping a disc typically relies on many moving parts to contact the disc on the outside of the chuck, but creates many particles as the chuck rotates and when the disc is removed from the clamp, Particles can contaminate the disc.

[0003] Traditional methods of fixing the disc in some cases are usually do...

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