Method and device for measuring lateral magnification of optical system

A technology of lateral magnification and optical system, applied in the field of metrology equipment, can solve the problem of low repeatability of lateral magnification measurement, achieve the effect of improving the repeatability of measurement results, reducing errors, and improving repeatability

Active Publication Date: 2012-07-25
HARBIN INST OF TECH
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Problems solved by technology

[0028] The present invention aims at the large distortion optical system of the above-mentioned existing measurement method, which is not suitable for measurement in a large field of view, but in a small field of view, there is the problem of low repeatability of lateral magnification measurement, and the existing measurement device has the problem of separation In view of the problem of focusing, a metho

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  • Method and device for measuring lateral magnification of optical system
  • Method and device for measuring lateral magnification of optical system
  • Method and device for measuring lateral magnification of optical system

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[0052] The specific embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0053] figure 1 To use the line light source optical system lateral magnification measuring device structure schematic diagram, the plane optical path diagram is as follows figure 2 As shown; the device includes a line light source 1, an optical system 2, an image sensor 3. The line light source 1 is imaged onto the surface of the image sensor 3 through the optical system 2, and, in the optical axis direction of the device and the image sensor 3 line direction In the determined plane, the line light source 1 is curved, and any position on the line light source 1 is in-focus imaged onto the surface of the image sensor 3; wherein the horizontal length of the line light source 1 is 3mm, and the pixel pitch of the image sensor 3 is 5.6μm.

[0054] The method of measuring the lateral magnification of an optical system using a line light so...

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Abstract

The invention discloses a method and a device for measuring lateral magnification of an optical system, belonging to the metering equipment field taking optical method as characteristic, wherein the method comprises the steps of taking line light source as target to obtain a linear image; finding value range of the pixel distance in the frequency domain; using the search algorithm to perform computing to obtain lateral magnification of the optical system according to that the overlap ratio of the actual modulation transfer function curve related to the pixel distance and the theoretical actual modulation transfer function curve is the best on the least squares condition; and the line light source is a bent shape in a plane determined by the optical axis direction of the device and row or line direction of the image sensor; any position of the line light source can image focally to the surface of the image sensor. The method for measuring lateral magnification of an optical system in the invention is beneficial for reducing error between single measurement results so as to improve repeatability of the measurement result.

Description

technical field [0001] The method and device for measuring the lateral magnification of an optical system using a line light source belong to the field of metrology equipment characterized by the use of optical methods, and in particular relate to a method for measuring the lateral magnification of an optical system by using a line light source image in the frequency domain with a line light source as the target. Methods and devices. Background technique [0002] The lateral magnification of the optical system is a very important parameter in the field of medicine and precision measurement. It not only indicates the technical index of the optical system, but also can use this technical index to carry out precise measurement of other parameters. However, how to obtain the lateral magnification of an optical system is the primary problem in carrying out this work. [0003] 1. The measurement method of the lateral magnification of the optical system [0004] In July 1987, "Me...

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Application Information

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IPC IPC(8): G01M11/02
Inventor 谭久彬赵烟桥刘俭
Owner HARBIN INST OF TECH
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