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Mask and frame assembly of mask tensioning machine for deposition process

A mask sheet and mask technology, applied in the field of deposition process, can solve the problems of mask 12 wrinkling, shadow effect, uneven strength, etc., and achieve the effect of avoiding shadow effect

Inactive Publication Date: 2012-08-01
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] But adopting this traditional way to tension the mask 12, because the mask 12 itself has a certain tolerance, it tends to cause the mask 12 to wrinkle (wrinkling) in the display area due to uneven force, so that Shadow effect after evaporation process

Method used

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  • Mask and frame assembly of mask tensioning machine for deposition process
  • Mask and frame assembly of mask tensioning machine for deposition process
  • Mask and frame assembly of mask tensioning machine for deposition process

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Embodiment Construction

[0018] In order to make the technical content disclosed in this application more detailed and complete, reference may be made to the drawings and the following various specific embodiments of the present invention, and the same symbols in the drawings represent the same or similar components. However, those skilled in the art should understand that the examples provided below are not intended to limit the scope of the present invention. In addition, the drawings are only for schematic illustration and are not drawn according to their original scale.

[0019] refer to figure 2 , figure 2 A front view of a mask frame set of a mask tensioner for a deposition process according to an embodiment of the present invention is shown.

[0020] The mask frame group of the mask tensioner includes a frame body 21 and a mask 22 . Wherein, the frame body 21 has a protruding portion 211 around its periphery, that is, the surrounding surface of the frame body 21 is the protruding portion 2...

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Abstract

The invention provides a mask and frame assembly of a mask tensioning machine for a deposition process. The mask and frame assembly comprises a frame and a mask, bumps are arranged on the peripheral edge of the frame, and the mask is assembled on the frame and is jacked by the bumps of the frame. The mask and frame assembly has the advantages that the mask is jacked by the bumps of the frame, the surface of the mask is flatly pressed by a roller so as to be easily flattened, accordingly, crinkling of the mask is prevented, and a shadow effect caused by crinkling of the mask is avoided.

Description

technical field [0001] The present invention relates to a deposition process, in particular to a mask frame set of a mask tensioner used in the deposition process. Background technique [0002] Active-matrix organic light-emitting diodes (Active-matrix organic light-emitting diode, AMOLED) is a display technology that has gradually been widely used, and continues to develop in the direction of low power consumption, low cost, and large size. [0003] The evaporation process is the key to the development of AMOLED technology. At present, the most widely used method is Fine Metal Mask (FMM). However, FMM is prone to bending and sagging when it is large in size. A mask tensioning machine is used to tension the mask to avoid bending and sagging of the mask by its own gravity. [0004] Such as figure 1 as shown, figure 1 A front view of a mask frame set of a conventional mask tensioner is shown. [0005] Such as figure 1 As shown, the upper surface of the frame body 11 is a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04
Inventor 陈志彦黄世雄
Owner AU OPTRONICS CORP
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