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Optical filter, optical filter module, analysis device, and optical device

A technology of optical filter and light receiving element, which is applied in the direction of material analysis, optics, and material analysis by optical means, and can solve the problems of reducing the accuracy of gap amount and so on.

Active Publication Date: 2012-08-08
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Although the method of reducing the sensitivity of the electrodes to obtain the gap amount with high accuracy is mentioned, in this case, since the lead-out portion of the inner electrode portion overlaps with the outer electrode portion, an electrostatic force is generated in this portion, so There is a problem that the accuracy of the gap amount decreases due to the uneven force acting on it

Method used

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  • Optical filter, optical filter module, analysis device, and optical device
  • Optical filter, optical filter module, analysis device, and optical device
  • Optical filter, optical filter module, analysis device, and optical device

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Embodiment Construction

[0032] Next, preferred embodiments of the present invention will be described in detail. In addition, the present embodiment described below does not unduly limit the content of the present invention described in the scope of the claims, and all the structures described in the present embodiment are not necessarily solutions to the present invention.

[0033] 1. Optical filter

[0034] 1.1. Filter part of the optical filter

[0035] 1.1.1. Outline of filter section

[0036] figure 1 is a cross-sectional view of the optical filter 10 of this embodiment in a state where no voltage is applied, figure 2 is a cross-sectional view in a voltage-applied state. figure 1 and figure 2 The shown optical filter 10 includes a first substrate 20 and a second substrate 30 facing the first substrate 20 . In this embodiment, although the first substrate 20 is used as a fixed substrate and the second substrate is used as a movable substrate or a diaphragm, any one or both substrates may ...

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Abstract

An optical filter includes a first substrate, a second substrate, a first reflective film that is disposed on the first substrate, a second reflective film that is disposed on the second substrate, first and second fixed electrodes that are disposed on the first substrate at positions located at the periphery of the first reflective film in plan view, and first and second variable electrodes that are disposed on the second substrate and face the first and second fixed electrodes. Slit portions of the second variable electrode are formed such that the first and second variable electrodes have a center symmetrical structure with the reflective film as its center.

Description

technical field [0001] The invention relates to an optical filter, an optical filter module, an analysis device and an optical device. Background technique [0002] An interference filter in which the transmission wavelength is variable has been proposed (Patent Document 1). As shown in FIG. 3 of Patent Document 1, it has a pair of substrates held parallel to each other, a pair of multilayer films (reflective films) formed on the pair of substrates to face each other with a gap at a certain interval, and a pair of electrostatic drive electrodes for gap control. Such a variable-wavelength interference filter can control the gap by electrostatic attraction generated by the voltage applied to the electrostatic driving electrode, and change the central wavelength of transmitted light. [0003] [Patent Document 1]: Japanese Unexamined Patent Application Publication No. 11-142752 [0004] However, in such a variable wavelength interference filter, it is difficult to obtain a ga...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00G01J3/46G01N21/31
CPCG02B5/28G01J3/26G02B26/02G01N21/251G01J3/50
Inventor 松下友纪
Owner SEIKO EPSON CORP