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Monolithic tri-axis amr sensor and manufacturing method thereof

A kind of AMR sensor and sensor technology, which is applied in the manufacture of measuring instruments, instruments, three-component magnetometers, etc., can solve the problems that AMR sensors cannot realize three-axis integration, and achieve the effects of low cost, broad application prospects, and improved reliability

Active Publication Date: 2012-08-15
MEMSIC SEMICON WUXI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is that the existing AMR sensor cannot realize the defect of three-axis integration; the present invention aims to provide a single-chip three-axis AMR sensor with high reliability and low cost

Method used

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  • Monolithic tri-axis amr sensor and manufacturing method thereof
  • Monolithic tri-axis amr sensor and manufacturing method thereof
  • Monolithic tri-axis amr sensor and manufacturing method thereof

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Embodiment Construction

[0028] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] see figure 1 As shown, one embodiment of the present invention discloses a single-chip three-axis AMR sensor, which includes a substrate (not shown), a first horizontal sensor (not shown) disposed on the substrate, a second horizontal sensor ( not shown), a third level sensor and a flux concentrator 40 arranged on the third level sensor, wherein an insulating layer 50 is arranged between the first, second and third level sensors and the flux concentrator 40 (see figure 2 ). The first, second and third horizontal direction sensors respectively include at least two groups of sensors. In this embodiment, the third horizontal sensor includes two groups of sensors, namely, the first sensor group 10 and the second sensor group 11 , and the structures of the first sensor group 10 and the second sensor group 11 are the same. The first sens...

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Abstract

The utility model relates to a single-chip triaxial AMR (Adaptive Multi-Rate) sensor. The single-chip triaxial AMR sensor includes a substrate, a first horizontal sensor, a second horizontal sensor, a third horizontal sensor, and a flux concentrator arranged on the third horizontal sensor, wherein the first, the second and the third horizontal sensor are arranged on the substrate. The flux concentrator and the third horizontal sensor cooperate to realize a function of a Z-axis sensor. By utilizing the cooperation between the flux concentrator and the third horizontal sensor in the utility model, the measurement of a Z-axis direction is realized effectively, so as to make the integration of the triaxial AMR sensor possible, thereby improving the AMR sensor integration technology substantially. Moreover, the integrated triaxial AMR sensor has a low cost and high reliability.

Description

technical field [0001] The invention relates to a single-chip three-axis sensor and a manufacturing method thereof, in particular, a single-chip three-axis AMR sensor and a manufacturing method thereof. Background technique [0002] With the development of sensor technology, it is increasingly used in various applications. Moreover, it has also developed more and more types. For example, one of them is an anisotropic magnetoresistance (AMR)-based magnetic field sensor (hereinafter referred to as an AMR sensor). [0003] As shown in US Patent No. 5,247,278, it discloses an AMR sensor. Such AMR sensors for low-cost consumer applications are typically fabricated on silicon or other substrates using semiconductor fabrication techniques. The key lies in the magnetic material whose resistance value changes with the change of external magnetic field. [0004] Applying reliable semiconductor deposition technology, the magnetic thin film can be uniformly deposited on the substrat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/09G01R3/00
CPCG01R33/0206G01R33/096
Inventor 蔡永耀卞锺元赵阳蒋乐跃
Owner MEMSIC SEMICON WUXI