Sealing method and device thereof
A sealing device and sealing material technology, which is applied in the direction of lighting devices, instruments, electrical components, etc., can solve problems such as difficulty in leveling, uneven pressing force, and difficulty in maintaining a complete level of the mounting table all the time, so as to improve production efficiency and avoid pressure Deviation, quality improvement and yield effect
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[0076] Hereinafter, embodiments of the present invention will be described in detail based on the drawings. In addition, in each figure, the same code|symbol is attached|subjected to the same part, and description is not repeated. In addition, the embodiment described below is a preferred specific example of the present invention, so various technically preferable limitations are given. However, as long as the scope of the present invention is not described in the following description, the present invention is limited. It is not limited to these embodiments.
[0077] exist figure 1 as well as figure 2 In the figure, reference numeral 1 is a hollow body which is a hollow body forming the first chamber CH1 inside, and an opening 1 a is formed on the upper surface, and a substrate carrying-in window 1 b is formed on an arbitrary side surface. Furthermore, an intake / exhaust pipe P1 connected to an intake / exhaust circuit described later is disposed on the cavity case 1 .
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