Automatic locking mechanism for opening door type crystal growth equipment

Abstract

The invention relates to opening door type crystal growth equipment and aims to provide an automatic locking mechanism for the opening door type crystal growth equipment. The automatic locking mechanism comprises a cylinder and an air inflow loop which is connected with the cylinder, wherein a solenoid valve is arranged on the air inflow loop and is connected with a control unit through a signal line; the cylinder is fixed on a cylinder base; the cylinder base is fixed on a wall of the crystal growth equipment; a slide block is arranged in the cylinder base; one end of the slide block is connected with a shaft of the cylinder while the other end is a sealed end; the sealed end of the slide block corresponds to a side edge of a door or window; sealing surfaces are respectively arranged at the sealed end and the side edge; each of the sealing surfaces comprises a plane part and a slope part which are connected; and the plane parts and the slope parts between the two sealing surfaces correspond to each other and are matched with each other. When the opening door type crystal growth equipment is under working state, the openable structure, such as the door or window, and the like, can be locked by the automatic locking mechanism, so that the sealing property and safety of the equipment are ensured, a detected data signal is supplied for the whole system control, the production efficiency is increased while the safety is ensured and the industrialization is realized.

Description

technical field [0001] The invention relates to a door-opening type crystal growth equipment, in particular to a locking mechanism for improving the automation degree of the crystal growth equipment. Background technique [0002] Monocrystalline silicon is a relatively active non-metallic element, an important part of crystalline materials, and is at the forefront of the development of new materials. Silicon material is the foundation of modern information society. It is not only the main functional material of photovoltaic power generation and other industries, but also the basic material of semiconductor industry, especially power electronic devices. The production of single crystal silicon by zone melting method (FZ) is a new type of single crystal growth method different from Czochralski furnace (CZ). It uses high-frequency induction heating coils to partially melt high-purity polycrystalline materials. The melting zone relies on melting The surface tension of the silic...

AI Technical Summary

Problems solved by technology

[0004] The existing locking methods for open-door crystal growth equipment are mainly the direct tightening of screws or the sealing of quick-release flanges. The amount of manual operation is large, which affects the efficiency of single crystal production, and cannot meet the requirements of automated production

Images